9/2/2010	9:21:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/2/2010	9:21:28 AM	Recipe started at 9:21 AM
9/2/2010	9:21:28 AM	H2 valve closed
9/2/2010	9:21:28 AM	BCl3 valve closed
9/2/2010	9:21:28 AM	PH3 valve closed
9/2/2010	9:21:28 AM	SiCl4 pre valve closed
9/2/2010	9:21:28 AM	SiCl4 post valve closed
9/2/2010	9:21:28 AM	Main Vac valve closed
9/2/2010	9:21:28 AM	Bypass valve closed
9/2/2010	9:21:28 AM	Bubbler valve closed
9/2/2010	9:21:28 AM	Helium valve opened
9/2/2010	9:21:28 AM	Helium MFC set to  500.000000
9/2/2010	9:21:28 AM	H2 MFC set to  0.000000
9/2/2010	9:21:28 AM	BCl3 MFC set to  0.000000
9/2/2010	9:21:28 AM	PHl3 MFC set to  0.000000
9/2/2010	9:21:28 AM	SiCl4 MFC set to  0.000000
9/2/2010	9:21:28 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	9:21:28 AM	Tube furnace set to 0
9/2/2010	9:22:48 AM	Helium valve closed
9/2/2010	9:22:48 AM	H2 valve closed
9/2/2010	9:22:48 AM	BCl3 valve closed
9/2/2010	9:22:48 AM	PH3 valve closed
9/2/2010	9:22:48 AM	SiCl4 pre valve closed
9/2/2010	9:22:48 AM	SiCl4 post valve closed
9/2/2010	9:22:48 AM	Main Vac valve closed
9/2/2010	9:22:48 AM	Bypass valve closed
9/2/2010	9:22:48 AM	Bubbler valve closed
9/2/2010	9:22:48 AM	Helium MFC set to  0.000000
9/2/2010	9:22:48 AM	H2 MFC set to  0.000000
9/2/2010	9:22:48 AM	BCl3 MFC set to  0.000000
9/2/2010	9:22:48 AM	PHl3 MFC set to  0.000000
9/2/2010	9:22:48 AM	SiCl4 MFC set to  0.000000
9/2/2010	9:22:48 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	9:22:48 AM	Tube furnace set to 0
9/2/2010	9:22:49 AM	Run finished at 9:22 AM
9/2/2010	9:22:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/2/2010	9:30:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/2/2010	9:30:48 AM	Recipe started at 9:30 AM
9/2/2010	9:30:48 AM	Helium valve closed
9/2/2010	9:30:48 AM	H2 valve closed
9/2/2010	9:30:48 AM	BCl3 valve closed
9/2/2010	9:30:48 AM	PH3 valve closed
9/2/2010	9:30:48 AM	SiCl4 pre valve closed
9/2/2010	9:30:48 AM	SiCl4 post valve closed
9/2/2010	9:30:48 AM	Main Vac valve closed
9/2/2010	9:30:48 AM	Bubbler valve closed
9/2/2010	9:30:48 AM	Bypass valve opened
9/2/2010	9:30:48 AM	Helium MFC set to  0.000000
9/2/2010	9:30:48 AM	H2 MFC set to  0.000000
9/2/2010	9:30:48 AM	BCl3 MFC set to  0.000000
9/2/2010	9:30:48 AM	PHl3 MFC set to  0.000000
9/2/2010	9:30:48 AM	SiCl4 MFC set to  0.000000
9/2/2010	9:30:48 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	9:30:48 AM	Tube furnace set to 0
9/2/2010	9:31:27 AM	Helium valve closed
9/2/2010	9:31:27 AM	H2 valve closed
9/2/2010	9:31:27 AM	BCl3 valve closed
9/2/2010	9:31:27 AM	PH3 valve closed
9/2/2010	9:31:27 AM	SiCl4 pre valve closed
9/2/2010	9:31:27 AM	SiCl4 post valve closed
9/2/2010	9:31:27 AM	Bubbler valve closed
9/2/2010	9:31:27 AM	Main Vac valve opened
9/2/2010	9:31:27 AM	Bypass valve opened
9/2/2010	9:31:27 AM	Helium MFC set to  0.000000
9/2/2010	9:31:27 AM	H2 MFC set to  0.000000
9/2/2010	9:31:27 AM	BCl3 MFC set to  0.000000
9/2/2010	9:31:27 AM	PHl3 MFC set to  0.000000
9/2/2010	9:31:27 AM	SiCl4 MFC set to  0.000000
9/2/2010	9:31:27 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	9:31:27 AM	Tube furnace set to 0
9/2/2010	9:31:27 AM	Run finished at 9:31 AM
9/2/2010	9:31:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/2/2010	9:34:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	9:34:35 AM	Recipe started at 9:34 AM
9/2/2010	9:34:35 AM	Helium valve closed
9/2/2010	9:34:35 AM	H2 valve closed
9/2/2010	9:34:35 AM	BCl3 valve closed
9/2/2010	9:34:35 AM	PH3 valve closed
9/2/2010	9:34:35 AM	SiCl4 pre valve closed
9/2/2010	9:34:35 AM	SiCl4 post valve closed
9/2/2010	9:34:35 AM	Main Vac valve closed
9/2/2010	9:34:35 AM	Bubbler valve closed
9/2/2010	9:34:35 AM	Bypass valve opened
9/2/2010	9:34:35 AM	Helium MFC set to  0.000000
9/2/2010	9:34:35 AM	H2 MFC set to  0.000000
9/2/2010	9:34:35 AM	BCl3 MFC set to  0.000000
9/2/2010	9:34:35 AM	PHl3 MFC set to  0.000000
9/2/2010	9:34:35 AM	SiCl4 MFC set to  0.000000
9/2/2010	9:34:35 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	9:34:35 AM	Tube furnace set to 0
9/2/2010	9:34:36 AM	Helium valve closed
9/2/2010	9:34:36 AM	H2 valve closed
9/2/2010	9:34:36 AM	BCl3 valve closed
9/2/2010	9:34:36 AM	PH3 valve closed
9/2/2010	9:34:36 AM	SiCl4 pre valve closed
9/2/2010	9:34:36 AM	SiCl4 post valve closed
9/2/2010	9:34:36 AM	Bubbler valve closed
9/2/2010	9:34:36 AM	Main Vac valve opened
9/2/2010	9:34:36 AM	Bypass valve opened
9/2/2010	9:34:36 AM	Helium MFC set to  0.000000
9/2/2010	9:34:36 AM	H2 MFC set to  0.000000
9/2/2010	9:34:36 AM	BCl3 MFC set to  0.000000
9/2/2010	9:34:36 AM	PHl3 MFC set to  0.000000
9/2/2010	9:34:36 AM	SiCl4 MFC set to  0.000000
9/2/2010	9:34:36 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	9:34:36 AM	Tube furnace set to 0
9/2/2010	9:35:36 AM	H2 valve closed
9/2/2010	9:35:36 AM	BCl3 valve closed
9/2/2010	9:35:36 AM	PH3 valve closed
9/2/2010	9:35:36 AM	SiCl4 pre valve closed
9/2/2010	9:35:36 AM	SiCl4 post valve closed
9/2/2010	9:35:36 AM	Bubbler valve closed
9/2/2010	9:35:36 AM	Helium valve opened
9/2/2010	9:35:36 AM	Main Vac valve opened
9/2/2010	9:35:36 AM	Bypass valve opened
9/2/2010	9:35:36 AM	Helium MFC set to  100.000000
9/2/2010	9:35:36 AM	H2 MFC set to  0.000000
9/2/2010	9:35:36 AM	BCl3 MFC set to  0.000000
9/2/2010	9:35:36 AM	PHl3 MFC set to  0.000000
9/2/2010	9:35:36 AM	SiCl4 MFC set to  0.000000
9/2/2010	9:35:36 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	9:35:36 AM	Tube furnace set to 0
9/2/2010	9:44:36 AM	Helium valve closed
9/2/2010	9:44:36 AM	H2 valve closed
9/2/2010	9:44:36 AM	BCl3 valve closed
9/2/2010	9:44:36 AM	PH3 valve closed
9/2/2010	9:44:36 AM	SiCl4 pre valve closed
9/2/2010	9:44:36 AM	SiCl4 post valve closed
9/2/2010	9:44:36 AM	Bubbler valve closed
9/2/2010	9:44:36 AM	Main Vac valve opened
9/2/2010	9:44:36 AM	Bypass valve opened
9/2/2010	9:44:36 AM	Helium MFC set to  0.000000
9/2/2010	9:44:36 AM	H2 MFC set to  0.000000
9/2/2010	9:44:36 AM	BCl3 MFC set to  0.000000
9/2/2010	9:44:36 AM	PHl3 MFC set to  0.000000
9/2/2010	9:44:36 AM	SiCl4 MFC set to  0.000000
9/2/2010	9:44:36 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	9:44:36 AM	Tube furnace set to 0
9/2/2010	9:45:36 AM	H2 valve closed
9/2/2010	9:45:36 AM	BCl3 valve closed
9/2/2010	9:45:36 AM	PH3 valve closed
9/2/2010	9:45:36 AM	SiCl4 pre valve closed
9/2/2010	9:45:36 AM	SiCl4 post valve closed
9/2/2010	9:45:36 AM	Bubbler valve closed
9/2/2010	9:45:36 AM	Helium valve opened
9/2/2010	9:45:36 AM	Main Vac valve opened
9/2/2010	9:45:36 AM	Bypass valve opened
9/2/2010	9:45:36 AM	Helium MFC set to  100.000000
9/2/2010	9:45:36 AM	H2 MFC set to  0.000000
9/2/2010	9:45:36 AM	BCl3 MFC set to  0.000000
9/2/2010	9:45:36 AM	PHl3 MFC set to  0.000000
9/2/2010	9:45:36 AM	SiCl4 MFC set to  0.000000
9/2/2010	9:45:36 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	9:45:36 AM	Tube furnace set to 0
9/2/2010	9:54:36 AM	Helium valve closed
9/2/2010	9:54:36 AM	H2 valve closed
9/2/2010	9:54:36 AM	BCl3 valve closed
9/2/2010	9:54:36 AM	PH3 valve closed
9/2/2010	9:54:36 AM	SiCl4 pre valve closed
9/2/2010	9:54:36 AM	SiCl4 post valve closed
9/2/2010	9:54:36 AM	Bubbler valve closed
9/2/2010	9:54:36 AM	Main Vac valve opened
9/2/2010	9:54:36 AM	Bypass valve opened
9/2/2010	9:54:36 AM	Helium MFC set to  0.000000
9/2/2010	9:54:36 AM	H2 MFC set to  0.000000
9/2/2010	9:54:36 AM	BCl3 MFC set to  0.000000
9/2/2010	9:54:36 AM	PHl3 MFC set to  0.000000
9/2/2010	9:54:36 AM	SiCl4 MFC set to  0.000000
9/2/2010	9:54:36 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	9:54:37 AM	Tube furnace set to 0
9/2/2010	9:55:37 AM	H2 valve closed
9/2/2010	9:55:37 AM	BCl3 valve closed
9/2/2010	9:55:37 AM	PH3 valve closed
9/2/2010	9:55:37 AM	SiCl4 pre valve closed
9/2/2010	9:55:37 AM	SiCl4 post valve closed
9/2/2010	9:55:37 AM	Bubbler valve closed
9/2/2010	9:55:37 AM	Helium valve opened
9/2/2010	9:55:37 AM	Main Vac valve opened
9/2/2010	9:55:37 AM	Bypass valve opened
9/2/2010	9:55:37 AM	Helium MFC set to  100.000000
9/2/2010	9:55:37 AM	H2 MFC set to  0.000000
9/2/2010	9:55:37 AM	BCl3 MFC set to  0.000000
9/2/2010	9:55:37 AM	PHl3 MFC set to  0.000000
9/2/2010	9:55:37 AM	SiCl4 MFC set to  0.000000
9/2/2010	9:55:37 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	9:55:37 AM	Tube furnace set to 0
9/2/2010	9:59:14 AM	Helium valve closed
9/2/2010	9:59:14 AM	H2 valve closed
9/2/2010	9:59:14 AM	BCl3 valve closed
9/2/2010	9:59:14 AM	PH3 valve closed
9/2/2010	9:59:14 AM	SiCl4 pre valve closed
9/2/2010	9:59:14 AM	SiCl4 post valve closed
9/2/2010	9:59:14 AM	Bubbler valve closed
9/2/2010	9:59:14 AM	Main Vac valve opened
9/2/2010	9:59:14 AM	Bypass valve opened
9/2/2010	9:59:14 AM	Helium MFC set to  0.000000
9/2/2010	9:59:14 AM	H2 MFC set to  0.000000
9/2/2010	9:59:14 AM	BCl3 MFC set to  0.000000
9/2/2010	9:59:14 AM	PHl3 MFC set to  0.000000
9/2/2010	9:59:14 AM	SiCl4 MFC set to  0.000000
9/2/2010	9:59:14 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	9:59:14 AM	Tube furnace set to 0
9/2/2010	9:59:15 AM	Run finished at 9:59 AM
9/2/2010	9:59:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	9:59:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	9:59:21 AM	Recipe started at 9:59 AM
9/2/2010	9:59:21 AM	Helium valve closed
9/2/2010	9:59:21 AM	H2 valve closed
9/2/2010	9:59:21 AM	BCl3 valve closed
9/2/2010	9:59:21 AM	PH3 valve closed
9/2/2010	9:59:21 AM	SiCl4 pre valve closed
9/2/2010	9:59:21 AM	SiCl4 post valve closed
9/2/2010	9:59:21 AM	Main Vac valve closed
9/2/2010	9:59:21 AM	Bubbler valve closed
9/2/2010	9:59:21 AM	Bypass valve opened
9/2/2010	9:59:21 AM	Helium MFC set to  0.000000
9/2/2010	9:59:21 AM	H2 MFC set to  0.000000
9/2/2010	9:59:21 AM	BCl3 MFC set to  0.000000
9/2/2010	9:59:21 AM	PHl3 MFC set to  0.000000
9/2/2010	9:59:21 AM	SiCl4 MFC set to  0.000000
9/2/2010	9:59:21 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	9:59:21 AM	Tube furnace set to 0
9/2/2010	9:59:21 AM	Helium valve closed
9/2/2010	9:59:21 AM	H2 valve closed
9/2/2010	9:59:21 AM	BCl3 valve closed
9/2/2010	9:59:21 AM	PH3 valve closed
9/2/2010	9:59:21 AM	SiCl4 pre valve closed
9/2/2010	9:59:21 AM	SiCl4 post valve closed
9/2/2010	9:59:21 AM	Bubbler valve closed
9/2/2010	9:59:21 AM	Main Vac valve opened
9/2/2010	9:59:21 AM	Bypass valve opened
9/2/2010	9:59:21 AM	Helium MFC set to  0.000000
9/2/2010	9:59:21 AM	H2 MFC set to  0.000000
9/2/2010	9:59:21 AM	BCl3 MFC set to  0.000000
9/2/2010	9:59:21 AM	PHl3 MFC set to  0.000000
9/2/2010	9:59:21 AM	SiCl4 MFC set to  0.000000
9/2/2010	9:59:21 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	9:59:22 AM	Tube furnace set to 0
9/2/2010	10:00:22 AM	H2 valve closed
9/2/2010	10:00:22 AM	BCl3 valve closed
9/2/2010	10:00:22 AM	PH3 valve closed
9/2/2010	10:00:22 AM	SiCl4 pre valve closed
9/2/2010	10:00:22 AM	SiCl4 post valve closed
9/2/2010	10:00:22 AM	Bubbler valve closed
9/2/2010	10:00:22 AM	Helium valve opened
9/2/2010	10:00:22 AM	Main Vac valve opened
9/2/2010	10:00:22 AM	Bypass valve opened
9/2/2010	10:00:22 AM	Helium MFC set to  100.000000
9/2/2010	10:00:22 AM	H2 MFC set to  0.000000
9/2/2010	10:00:22 AM	BCl3 MFC set to  0.000000
9/2/2010	10:00:22 AM	PHl3 MFC set to  0.000000
9/2/2010	10:00:22 AM	SiCl4 MFC set to  0.000000
9/2/2010	10:00:22 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	10:00:22 AM	Tube furnace set to 0
9/2/2010	10:09:22 AM	Helium valve closed
9/2/2010	10:09:22 AM	H2 valve closed
9/2/2010	10:09:22 AM	BCl3 valve closed
9/2/2010	10:09:22 AM	PH3 valve closed
9/2/2010	10:09:22 AM	SiCl4 pre valve closed
9/2/2010	10:09:22 AM	SiCl4 post valve closed
9/2/2010	10:09:22 AM	Bubbler valve closed
9/2/2010	10:09:22 AM	Main Vac valve opened
9/2/2010	10:09:22 AM	Bypass valve opened
9/2/2010	10:09:22 AM	Helium MFC set to  0.000000
9/2/2010	10:09:22 AM	H2 MFC set to  0.000000
9/2/2010	10:09:22 AM	BCl3 MFC set to  0.000000
9/2/2010	10:09:22 AM	PHl3 MFC set to  0.000000
9/2/2010	10:09:22 AM	SiCl4 MFC set to  0.000000
9/2/2010	10:09:22 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	10:09:22 AM	Tube furnace set to 0
9/2/2010	10:10:22 AM	H2 valve closed
9/2/2010	10:10:22 AM	BCl3 valve closed
9/2/2010	10:10:22 AM	PH3 valve closed
9/2/2010	10:10:22 AM	SiCl4 pre valve closed
9/2/2010	10:10:22 AM	SiCl4 post valve closed
9/2/2010	10:10:22 AM	Bubbler valve closed
9/2/2010	10:10:22 AM	Helium valve opened
9/2/2010	10:10:22 AM	Main Vac valve opened
9/2/2010	10:10:22 AM	Bypass valve opened
9/2/2010	10:10:22 AM	Helium MFC set to  100.000000
9/2/2010	10:10:22 AM	H2 MFC set to  0.000000
9/2/2010	10:10:22 AM	BCl3 MFC set to  0.000000
9/2/2010	10:10:22 AM	PHl3 MFC set to  0.000000
9/2/2010	10:10:22 AM	SiCl4 MFC set to  0.000000
9/2/2010	10:10:22 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	10:10:22 AM	Tube furnace set to 0
9/2/2010	10:19:22 AM	Helium valve closed
9/2/2010	10:19:22 AM	H2 valve closed
9/2/2010	10:19:22 AM	BCl3 valve closed
9/2/2010	10:19:22 AM	PH3 valve closed
9/2/2010	10:19:22 AM	SiCl4 pre valve closed
9/2/2010	10:19:22 AM	SiCl4 post valve closed
9/2/2010	10:19:22 AM	Bubbler valve closed
9/2/2010	10:19:22 AM	Main Vac valve opened
9/2/2010	10:19:22 AM	Bypass valve opened
9/2/2010	10:19:22 AM	Helium MFC set to  0.000000
9/2/2010	10:19:22 AM	H2 MFC set to  0.000000
9/2/2010	10:19:22 AM	BCl3 MFC set to  0.000000
9/2/2010	10:19:22 AM	PHl3 MFC set to  0.000000
9/2/2010	10:19:22 AM	SiCl4 MFC set to  0.000000
9/2/2010	10:19:22 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	10:19:22 AM	Tube furnace set to 0
9/2/2010	10:20:22 AM	H2 valve closed
9/2/2010	10:20:22 AM	BCl3 valve closed
9/2/2010	10:20:22 AM	PH3 valve closed
9/2/2010	10:20:22 AM	SiCl4 pre valve closed
9/2/2010	10:20:22 AM	SiCl4 post valve closed
9/2/2010	10:20:22 AM	Bubbler valve closed
9/2/2010	10:20:22 AM	Helium valve opened
9/2/2010	10:20:22 AM	Main Vac valve opened
9/2/2010	10:20:22 AM	Bypass valve opened
9/2/2010	10:20:22 AM	Helium MFC set to  100.000000
9/2/2010	10:20:22 AM	H2 MFC set to  0.000000
9/2/2010	10:20:22 AM	BCl3 MFC set to  0.000000
9/2/2010	10:20:22 AM	PHl3 MFC set to  0.000000
9/2/2010	10:20:22 AM	SiCl4 MFC set to  0.000000
9/2/2010	10:20:22 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	10:20:23 AM	Tube furnace set to 0
9/2/2010	10:29:23 AM	Helium valve closed
9/2/2010	10:29:23 AM	H2 valve closed
9/2/2010	10:29:23 AM	BCl3 valve closed
9/2/2010	10:29:23 AM	PH3 valve closed
9/2/2010	10:29:23 AM	SiCl4 pre valve closed
9/2/2010	10:29:23 AM	SiCl4 post valve closed
9/2/2010	10:29:23 AM	Bubbler valve closed
9/2/2010	10:29:23 AM	Main Vac valve opened
9/2/2010	10:29:23 AM	Bypass valve opened
9/2/2010	10:29:23 AM	Helium MFC set to  0.000000
9/2/2010	10:29:23 AM	H2 MFC set to  0.000000
9/2/2010	10:29:23 AM	BCl3 MFC set to  0.000000
9/2/2010	10:29:23 AM	PHl3 MFC set to  0.000000
9/2/2010	10:29:23 AM	SiCl4 MFC set to  0.000000
9/2/2010	10:29:23 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	10:29:23 AM	Tube furnace set to 0
9/2/2010	10:29:24 AM	Run finished at 10:29 AM
9/2/2010	10:29:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	10:36:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	10:36:05 AM	Recipe started at 10:36 AM
9/2/2010	10:36:05 AM	Helium valve closed
9/2/2010	10:36:05 AM	H2 valve closed
9/2/2010	10:36:05 AM	BCl3 valve closed
9/2/2010	10:36:05 AM	PH3 valve closed
9/2/2010	10:36:05 AM	SiCl4 pre valve closed
9/2/2010	10:36:05 AM	SiCl4 post valve closed
9/2/2010	10:36:05 AM	Main Vac valve closed
9/2/2010	10:36:05 AM	Bubbler valve closed
9/2/2010	10:36:05 AM	Bypass valve opened
9/2/2010	10:36:05 AM	Helium MFC set to  0.000000
9/2/2010	10:36:05 AM	H2 MFC set to  0.000000
9/2/2010	10:36:05 AM	BCl3 MFC set to  0.000000
9/2/2010	10:36:05 AM	PHl3 MFC set to  0.000000
9/2/2010	10:36:05 AM	SiCl4 MFC set to  0.000000
9/2/2010	10:36:05 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	10:36:05 AM	Tube furnace set to 0
9/2/2010	10:36:05 AM	Helium valve closed
9/2/2010	10:36:05 AM	H2 valve closed
9/2/2010	10:36:05 AM	BCl3 valve closed
9/2/2010	10:36:05 AM	PH3 valve closed
9/2/2010	10:36:05 AM	SiCl4 pre valve closed
9/2/2010	10:36:05 AM	SiCl4 post valve closed
9/2/2010	10:36:05 AM	Bubbler valve closed
9/2/2010	10:36:05 AM	Main Vac valve opened
9/2/2010	10:36:05 AM	Bypass valve opened
9/2/2010	10:36:05 AM	Helium MFC set to  0.000000
9/2/2010	10:36:05 AM	H2 MFC set to  0.000000
9/2/2010	10:36:05 AM	BCl3 MFC set to  0.000000
9/2/2010	10:36:05 AM	PHl3 MFC set to  0.000000
9/2/2010	10:36:05 AM	SiCl4 MFC set to  0.000000
9/2/2010	10:36:05 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	10:36:06 AM	Tube furnace set to 0
9/2/2010	10:37:06 AM	H2 valve closed
9/2/2010	10:37:06 AM	BCl3 valve closed
9/2/2010	10:37:06 AM	PH3 valve closed
9/2/2010	10:37:06 AM	SiCl4 pre valve closed
9/2/2010	10:37:06 AM	SiCl4 post valve closed
9/2/2010	10:37:06 AM	Bubbler valve closed
9/2/2010	10:37:06 AM	Helium valve opened
9/2/2010	10:37:06 AM	Main Vac valve opened
9/2/2010	10:37:06 AM	Bypass valve opened
9/2/2010	10:37:06 AM	Helium MFC set to  100.000000
9/2/2010	10:37:06 AM	H2 MFC set to  0.000000
9/2/2010	10:37:06 AM	BCl3 MFC set to  0.000000
9/2/2010	10:37:06 AM	PHl3 MFC set to  0.000000
9/2/2010	10:37:06 AM	SiCl4 MFC set to  0.000000
9/2/2010	10:37:06 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	10:37:06 AM	Tube furnace set to 0
9/2/2010	10:46:06 AM	Helium valve closed
9/2/2010	10:46:06 AM	H2 valve closed
9/2/2010	10:46:06 AM	BCl3 valve closed
9/2/2010	10:46:06 AM	PH3 valve closed
9/2/2010	10:46:06 AM	SiCl4 pre valve closed
9/2/2010	10:46:06 AM	SiCl4 post valve closed
9/2/2010	10:46:06 AM	Bubbler valve closed
9/2/2010	10:46:06 AM	Main Vac valve opened
9/2/2010	10:46:06 AM	Bypass valve opened
9/2/2010	10:46:06 AM	Helium MFC set to  0.000000
9/2/2010	10:46:06 AM	H2 MFC set to  0.000000
9/2/2010	10:46:06 AM	BCl3 MFC set to  0.000000
9/2/2010	10:46:06 AM	PHl3 MFC set to  0.000000
9/2/2010	10:46:06 AM	SiCl4 MFC set to  0.000000
9/2/2010	10:46:06 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	10:46:06 AM	Tube furnace set to 0
9/2/2010	10:47:06 AM	H2 valve closed
9/2/2010	10:47:06 AM	BCl3 valve closed
9/2/2010	10:47:06 AM	PH3 valve closed
9/2/2010	10:47:06 AM	SiCl4 pre valve closed
9/2/2010	10:47:06 AM	SiCl4 post valve closed
9/2/2010	10:47:06 AM	Bubbler valve closed
9/2/2010	10:47:06 AM	Helium valve opened
9/2/2010	10:47:06 AM	Main Vac valve opened
9/2/2010	10:47:06 AM	Bypass valve opened
9/2/2010	10:47:06 AM	Helium MFC set to  100.000000
9/2/2010	10:47:06 AM	H2 MFC set to  0.000000
9/2/2010	10:47:06 AM	BCl3 MFC set to  0.000000
9/2/2010	10:47:06 AM	PHl3 MFC set to  0.000000
9/2/2010	10:47:06 AM	SiCl4 MFC set to  0.000000
9/2/2010	10:47:06 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	10:47:06 AM	Tube furnace set to 0
9/2/2010	10:56:06 AM	Helium valve closed
9/2/2010	10:56:06 AM	H2 valve closed
9/2/2010	10:56:06 AM	BCl3 valve closed
9/2/2010	10:56:06 AM	PH3 valve closed
9/2/2010	10:56:06 AM	SiCl4 pre valve closed
9/2/2010	10:56:06 AM	SiCl4 post valve closed
9/2/2010	10:56:06 AM	Bubbler valve closed
9/2/2010	10:56:06 AM	Main Vac valve opened
9/2/2010	10:56:06 AM	Bypass valve opened
9/2/2010	10:56:06 AM	Helium MFC set to  0.000000
9/2/2010	10:56:06 AM	H2 MFC set to  0.000000
9/2/2010	10:56:06 AM	BCl3 MFC set to  0.000000
9/2/2010	10:56:06 AM	PHl3 MFC set to  0.000000
9/2/2010	10:56:06 AM	SiCl4 MFC set to  0.000000
9/2/2010	10:56:06 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	10:56:06 AM	Tube furnace set to 0
9/2/2010	10:57:07 AM	H2 valve closed
9/2/2010	10:57:07 AM	BCl3 valve closed
9/2/2010	10:57:07 AM	PH3 valve closed
9/2/2010	10:57:07 AM	SiCl4 pre valve closed
9/2/2010	10:57:07 AM	SiCl4 post valve closed
9/2/2010	10:57:07 AM	Bubbler valve closed
9/2/2010	10:57:07 AM	Helium valve opened
9/2/2010	10:57:07 AM	Main Vac valve opened
9/2/2010	10:57:07 AM	Bypass valve opened
9/2/2010	10:57:07 AM	Helium MFC set to  100.000000
9/2/2010	10:57:07 AM	H2 MFC set to  0.000000
9/2/2010	10:57:07 AM	BCl3 MFC set to  0.000000
9/2/2010	10:57:07 AM	PHl3 MFC set to  0.000000
9/2/2010	10:57:07 AM	SiCl4 MFC set to  0.000000
9/2/2010	10:57:07 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	10:57:07 AM	Tube furnace set to 0
9/2/2010	11:06:07 AM	Helium valve closed
9/2/2010	11:06:07 AM	H2 valve closed
9/2/2010	11:06:07 AM	BCl3 valve closed
9/2/2010	11:06:07 AM	PH3 valve closed
9/2/2010	11:06:07 AM	SiCl4 pre valve closed
9/2/2010	11:06:07 AM	SiCl4 post valve closed
9/2/2010	11:06:07 AM	Bubbler valve closed
9/2/2010	11:06:07 AM	Main Vac valve opened
9/2/2010	11:06:07 AM	Bypass valve opened
9/2/2010	11:06:07 AM	Helium MFC set to  0.000000
9/2/2010	11:06:07 AM	H2 MFC set to  0.000000
9/2/2010	11:06:07 AM	BCl3 MFC set to  0.000000
9/2/2010	11:06:07 AM	PHl3 MFC set to  0.000000
9/2/2010	11:06:07 AM	SiCl4 MFC set to  0.000000
9/2/2010	11:06:07 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	11:06:07 AM	Tube furnace set to 0
9/2/2010	11:06:08 AM	Run finished at 11:06 AM
9/2/2010	11:06:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	11:19:14 AM	Bypass valve closed
9/2/2010	11:19:15 AM	Main Vac valve closed
9/2/2010	11:19:33 AM	Bypass valve opened
9/2/2010	11:19:34 AM	Main Vac valve opened
9/2/2010	11:26:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	11:26:14 AM	Recipe started at 11:26 AM
9/2/2010	11:26:14 AM	Helium valve closed
9/2/2010	11:26:14 AM	H2 valve closed
9/2/2010	11:26:14 AM	BCl3 valve closed
9/2/2010	11:26:14 AM	PH3 valve closed
9/2/2010	11:26:14 AM	SiCl4 pre valve closed
9/2/2010	11:26:14 AM	SiCl4 post valve closed
9/2/2010	11:26:14 AM	Main Vac valve closed
9/2/2010	11:26:14 AM	Bubbler valve closed
9/2/2010	11:26:14 AM	Bypass valve opened
9/2/2010	11:26:14 AM	Helium MFC set to  0.000000
9/2/2010	11:26:14 AM	H2 MFC set to  0.000000
9/2/2010	11:26:14 AM	BCl3 MFC set to  0.000000
9/2/2010	11:26:14 AM	PHl3 MFC set to  0.000000
9/2/2010	11:26:14 AM	SiCl4 MFC set to  0.000000
9/2/2010	11:26:14 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	11:26:14 AM	Tube furnace set to 0
9/2/2010	11:26:14 AM	Helium valve closed
9/2/2010	11:26:14 AM	H2 valve closed
9/2/2010	11:26:14 AM	BCl3 valve closed
9/2/2010	11:26:14 AM	PH3 valve closed
9/2/2010	11:26:14 AM	SiCl4 pre valve closed
9/2/2010	11:26:14 AM	SiCl4 post valve closed
9/2/2010	11:26:14 AM	Bubbler valve closed
9/2/2010	11:26:14 AM	Main Vac valve opened
9/2/2010	11:26:14 AM	Bypass valve opened
9/2/2010	11:26:14 AM	Helium MFC set to  0.000000
9/2/2010	11:26:14 AM	H2 MFC set to  0.000000
9/2/2010	11:26:14 AM	BCl3 MFC set to  0.000000
9/2/2010	11:26:14 AM	PHl3 MFC set to  0.000000
9/2/2010	11:26:14 AM	SiCl4 MFC set to  0.000000
9/2/2010	11:26:14 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	11:26:14 AM	Tube furnace set to 0
9/2/2010	11:27:14 AM	H2 valve closed
9/2/2010	11:27:14 AM	BCl3 valve closed
9/2/2010	11:27:14 AM	PH3 valve closed
9/2/2010	11:27:14 AM	SiCl4 pre valve closed
9/2/2010	11:27:14 AM	SiCl4 post valve closed
9/2/2010	11:27:14 AM	Bubbler valve closed
9/2/2010	11:27:14 AM	Helium valve opened
9/2/2010	11:27:14 AM	Main Vac valve opened
9/2/2010	11:27:14 AM	Bypass valve opened
9/2/2010	11:27:14 AM	Helium MFC set to  100.000000
9/2/2010	11:27:14 AM	H2 MFC set to  0.000000
9/2/2010	11:27:14 AM	BCl3 MFC set to  0.000000
9/2/2010	11:27:14 AM	PHl3 MFC set to  0.000000
9/2/2010	11:27:14 AM	SiCl4 MFC set to  0.000000
9/2/2010	11:27:14 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	11:27:15 AM	Tube furnace set to 0
9/2/2010	11:35:37 AM	Helium valve closed
9/2/2010	11:35:37 AM	H2 valve closed
9/2/2010	11:35:37 AM	BCl3 valve closed
9/2/2010	11:35:37 AM	PH3 valve closed
9/2/2010	11:35:37 AM	SiCl4 pre valve closed
9/2/2010	11:35:37 AM	SiCl4 post valve closed
9/2/2010	11:35:37 AM	Bubbler valve closed
9/2/2010	11:35:37 AM	Main Vac valve opened
9/2/2010	11:35:37 AM	Bypass valve opened
9/2/2010	11:35:37 AM	Helium MFC set to  0.000000
9/2/2010	11:35:37 AM	H2 MFC set to  0.000000
9/2/2010	11:35:37 AM	BCl3 MFC set to  0.000000
9/2/2010	11:35:37 AM	PHl3 MFC set to  0.000000
9/2/2010	11:35:37 AM	SiCl4 MFC set to  0.000000
9/2/2010	11:35:37 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	11:35:37 AM	Tube furnace set to 0
9/2/2010	11:35:38 AM	H2 valve closed
9/2/2010	11:35:38 AM	BCl3 valve closed
9/2/2010	11:35:38 AM	PH3 valve closed
9/2/2010	11:35:38 AM	SiCl4 pre valve closed
9/2/2010	11:35:38 AM	SiCl4 post valve closed
9/2/2010	11:35:38 AM	Bubbler valve closed
9/2/2010	11:35:38 AM	Helium valve opened
9/2/2010	11:35:38 AM	Main Vac valve opened
9/2/2010	11:35:38 AM	Bypass valve opened
9/2/2010	11:35:38 AM	Helium MFC set to  100.000000
9/2/2010	11:35:38 AM	H2 MFC set to  0.000000
9/2/2010	11:35:38 AM	BCl3 MFC set to  0.000000
9/2/2010	11:35:38 AM	PHl3 MFC set to  0.000000
9/2/2010	11:35:38 AM	SiCl4 MFC set to  0.000000
9/2/2010	11:35:38 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	11:35:38 AM	Tube furnace set to 0
9/2/2010	11:35:39 AM	Helium valve closed
9/2/2010	11:35:39 AM	H2 valve closed
9/2/2010	11:35:39 AM	BCl3 valve closed
9/2/2010	11:35:39 AM	PH3 valve closed
9/2/2010	11:35:39 AM	SiCl4 pre valve closed
9/2/2010	11:35:39 AM	SiCl4 post valve closed
9/2/2010	11:35:39 AM	Bubbler valve closed
9/2/2010	11:35:39 AM	Main Vac valve opened
9/2/2010	11:35:39 AM	Bypass valve opened
9/2/2010	11:35:39 AM	Helium MFC set to  0.000000
9/2/2010	11:35:39 AM	H2 MFC set to  0.000000
9/2/2010	11:35:39 AM	BCl3 MFC set to  0.000000
9/2/2010	11:35:39 AM	PHl3 MFC set to  0.000000
9/2/2010	11:35:39 AM	SiCl4 MFC set to  0.000000
9/2/2010	11:35:39 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	11:35:39 AM	Tube furnace set to 0
9/2/2010	11:35:39 AM	H2 valve closed
9/2/2010	11:35:39 AM	BCl3 valve closed
9/2/2010	11:35:39 AM	PH3 valve closed
9/2/2010	11:35:39 AM	SiCl4 pre valve closed
9/2/2010	11:35:39 AM	SiCl4 post valve closed
9/2/2010	11:35:39 AM	Bubbler valve closed
9/2/2010	11:35:39 AM	Helium valve opened
9/2/2010	11:35:39 AM	Main Vac valve opened
9/2/2010	11:35:39 AM	Bypass valve opened
9/2/2010	11:35:39 AM	Helium MFC set to  100.000000
9/2/2010	11:35:39 AM	H2 MFC set to  0.000000
9/2/2010	11:35:39 AM	BCl3 MFC set to  0.000000
9/2/2010	11:35:39 AM	PHl3 MFC set to  0.000000
9/2/2010	11:35:39 AM	SiCl4 MFC set to  0.000000
9/2/2010	11:35:39 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	11:35:40 AM	Tube furnace set to 0
9/2/2010	11:35:40 AM	Helium valve closed
9/2/2010	11:35:40 AM	H2 valve closed
9/2/2010	11:35:40 AM	BCl3 valve closed
9/2/2010	11:35:40 AM	PH3 valve closed
9/2/2010	11:35:40 AM	SiCl4 pre valve closed
9/2/2010	11:35:40 AM	SiCl4 post valve closed
9/2/2010	11:35:40 AM	Bubbler valve closed
9/2/2010	11:35:40 AM	Main Vac valve opened
9/2/2010	11:35:40 AM	Bypass valve opened
9/2/2010	11:35:40 AM	Helium MFC set to  0.000000
9/2/2010	11:35:40 AM	H2 MFC set to  0.000000
9/2/2010	11:35:40 AM	BCl3 MFC set to  0.000000
9/2/2010	11:35:40 AM	PHl3 MFC set to  0.000000
9/2/2010	11:35:40 AM	SiCl4 MFC set to  0.000000
9/2/2010	11:35:40 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	11:35:40 AM	Tube furnace set to 0
9/2/2010	11:35:41 AM	Run finished at 11:35 AM
9/2/2010	11:35:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	11:43:27 AM	Recipe started at 11:43 AM
9/2/2010	11:43:27 AM	Helium valve closed
9/2/2010	11:43:27 AM	BCl3 valve closed
9/2/2010	11:43:27 AM	PH3 valve closed
9/2/2010	11:43:27 AM	SiCl4 pre valve closed
9/2/2010	11:43:27 AM	SiCl4 post valve closed
9/2/2010	11:43:27 AM	Main Vac valve closed
9/2/2010	11:43:27 AM	Bypass valve closed
9/2/2010	11:43:27 AM	Bubbler valve closed
9/2/2010	11:43:27 AM	H2 valve opened
9/2/2010	11:43:27 AM	Helium MFC set to  0.000000
9/2/2010	11:43:27 AM	H2 MFC set to  500.000000
9/2/2010	11:43:27 AM	BCl3 MFC set to  0.000000
9/2/2010	11:43:27 AM	PHl3 MFC set to  0.000000
9/2/2010	11:43:27 AM	SiCl4 MFC set to  0.000000
9/2/2010	11:43:27 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	11:43:27 AM	Tube furnace set to 0
9/2/2010	11:44:49 AM	Helium valve closed
9/2/2010	11:44:49 AM	BCl3 valve closed
9/2/2010	11:44:49 AM	PH3 valve closed
9/2/2010	11:44:49 AM	SiCl4 pre valve closed
9/2/2010	11:44:49 AM	SiCl4 post valve closed
9/2/2010	11:44:49 AM	Main Vac valve closed
9/2/2010	11:44:49 AM	Bypass valve closed
9/2/2010	11:44:49 AM	H2 valve opened
9/2/2010	11:44:49 AM	Bubbler valve opened
9/2/2010	11:44:49 AM	Helium MFC set to  0.000000
9/2/2010	11:44:49 AM	H2 MFC set to  500.000000
9/2/2010	11:44:49 AM	BCl3 MFC set to  0.000000
9/2/2010	11:44:49 AM	PHl3 MFC set to  0.000000
9/2/2010	11:44:49 AM	SiCl4 MFC set to  0.000000
9/2/2010	11:44:49 AM	Bypass solenoid MFC set to  0.000000
9/2/2010	11:44:50 AM	Tube furnace set to 1000
9/2/2010	12:04:50 PM	Helium valve closed
9/2/2010	12:04:50 PM	PH3 valve closed
9/2/2010	12:04:50 PM	Main Vac valve closed
9/2/2010	12:04:50 PM	Bypass valve closed
9/2/2010	12:04:50 PM	H2 valve opened
9/2/2010	12:04:50 PM	BCl3 valve opened
9/2/2010	12:04:50 PM	SiCl4 pre valve opened
9/2/2010	12:04:50 PM	SiCl4 post valve opened
9/2/2010	12:04:50 PM	Bubbler valve opened
9/2/2010	12:04:50 PM	Helium MFC set to  0.000000
9/2/2010	12:04:50 PM	H2 MFC set to  500.000000
9/2/2010	12:04:50 PM	BCl3 MFC set to  12.000000
9/2/2010	12:04:50 PM	PHl3 MFC set to  0.000000
9/2/2010	12:04:50 PM	SiCl4 MFC set to  50.000000
9/2/2010	12:04:50 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	12:04:50 PM	Tube furnace set to 1000
9/2/2010	12:18:10 PM	H2 valve closed
9/2/2010	12:18:10 PM	BCl3 valve closed
9/2/2010	12:18:10 PM	PH3 valve closed
9/2/2010	12:18:10 PM	SiCl4 pre valve closed
9/2/2010	12:18:10 PM	SiCl4 post valve closed
9/2/2010	12:18:10 PM	Main Vac valve closed
9/2/2010	12:18:10 PM	Bypass valve closed
9/2/2010	12:18:10 PM	Helium valve opened
9/2/2010	12:18:10 PM	Bubbler valve opened
9/2/2010	12:18:10 PM	Helium MFC set to  500.000000
9/2/2010	12:18:10 PM	H2 MFC set to  0.000000
9/2/2010	12:18:10 PM	BCl3 MFC set to  0.000000
9/2/2010	12:18:10 PM	PHl3 MFC set to  0.000000
9/2/2010	12:18:10 PM	SiCl4 MFC set to  0.000000
9/2/2010	12:18:10 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	12:18:10 PM	Tube furnace set to 0
9/2/2010	12:38:10 PM	Helium valve closed
9/2/2010	12:38:10 PM	H2 valve closed
9/2/2010	12:38:10 PM	BCl3 valve closed
9/2/2010	12:38:10 PM	PH3 valve closed
9/2/2010	12:38:10 PM	SiCl4 pre valve closed
9/2/2010	12:38:10 PM	SiCl4 post valve closed
9/2/2010	12:38:10 PM	Main Vac valve closed
9/2/2010	12:38:10 PM	Bypass valve closed
9/2/2010	12:38:10 PM	Bubbler valve closed
9/2/2010	12:38:10 PM	Helium MFC set to  0.000000
9/2/2010	12:38:10 PM	H2 MFC set to  0.000000
9/2/2010	12:38:10 PM	BCl3 MFC set to  0.000000
9/2/2010	12:38:10 PM	PHl3 MFC set to  0.000000
9/2/2010	12:38:10 PM	SiCl4 MFC set to  0.000000
9/2/2010	12:38:10 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	12:38:10 PM	Tube furnace set to 0
9/2/2010	12:38:10 PM	Run finished at 12:38 PM
9/2/2010	1:00:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/2/2010	1:00:10 PM	Recipe started at 1:00 PM
9/2/2010	1:00:10 PM	Helium valve closed
9/2/2010	1:00:10 PM	H2 valve closed
9/2/2010	1:00:10 PM	BCl3 valve closed
9/2/2010	1:00:10 PM	PH3 valve closed
9/2/2010	1:00:10 PM	SiCl4 pre valve closed
9/2/2010	1:00:10 PM	SiCl4 post valve closed
9/2/2010	1:00:10 PM	Main Vac valve closed
9/2/2010	1:00:10 PM	Bubbler valve closed
9/2/2010	1:00:10 PM	Bypass valve opened
9/2/2010	1:00:10 PM	Helium MFC set to  0.000000
9/2/2010	1:00:10 PM	H2 MFC set to  0.000000
9/2/2010	1:00:10 PM	BCl3 MFC set to  0.000000
9/2/2010	1:00:10 PM	PHl3 MFC set to  0.000000
9/2/2010	1:00:10 PM	SiCl4 MFC set to  0.000000
9/2/2010	1:00:10 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	1:00:10 PM	Tube furnace set to 0
9/2/2010	1:00:49 PM	Helium valve closed
9/2/2010	1:00:49 PM	H2 valve closed
9/2/2010	1:00:49 PM	BCl3 valve closed
9/2/2010	1:00:49 PM	PH3 valve closed
9/2/2010	1:00:49 PM	SiCl4 pre valve closed
9/2/2010	1:00:49 PM	SiCl4 post valve closed
9/2/2010	1:00:49 PM	Bubbler valve closed
9/2/2010	1:00:49 PM	Main Vac valve opened
9/2/2010	1:00:49 PM	Bypass valve opened
9/2/2010	1:00:49 PM	Helium MFC set to  0.000000
9/2/2010	1:00:49 PM	H2 MFC set to  0.000000
9/2/2010	1:00:49 PM	BCl3 MFC set to  0.000000
9/2/2010	1:00:49 PM	PHl3 MFC set to  0.000000
9/2/2010	1:00:49 PM	SiCl4 MFC set to  0.000000
9/2/2010	1:00:49 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	1:00:49 PM	Tube furnace set to 0
9/2/2010	1:00:50 PM	Run finished at 1:00 PM
9/2/2010	1:00:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/2/2010	1:06:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	1:06:05 PM	Recipe started at 1:06 PM
9/2/2010	1:06:05 PM	Helium valve closed
9/2/2010	1:06:05 PM	H2 valve closed
9/2/2010	1:06:05 PM	BCl3 valve closed
9/2/2010	1:06:05 PM	PH3 valve closed
9/2/2010	1:06:05 PM	SiCl4 pre valve closed
9/2/2010	1:06:05 PM	SiCl4 post valve closed
9/2/2010	1:06:05 PM	Main Vac valve closed
9/2/2010	1:06:05 PM	Bubbler valve closed
9/2/2010	1:06:05 PM	Bypass valve opened
9/2/2010	1:06:05 PM	Helium MFC set to  0.000000
9/2/2010	1:06:05 PM	H2 MFC set to  0.000000
9/2/2010	1:06:05 PM	BCl3 MFC set to  0.000000
9/2/2010	1:06:05 PM	PHl3 MFC set to  0.000000
9/2/2010	1:06:05 PM	SiCl4 MFC set to  0.000000
9/2/2010	1:06:05 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	1:06:05 PM	Tube furnace set to 0
9/2/2010	1:06:05 PM	Helium valve closed
9/2/2010	1:06:05 PM	H2 valve closed
9/2/2010	1:06:05 PM	BCl3 valve closed
9/2/2010	1:06:05 PM	PH3 valve closed
9/2/2010	1:06:05 PM	SiCl4 pre valve closed
9/2/2010	1:06:05 PM	SiCl4 post valve closed
9/2/2010	1:06:05 PM	Bubbler valve closed
9/2/2010	1:06:05 PM	Main Vac valve opened
9/2/2010	1:06:05 PM	Bypass valve opened
9/2/2010	1:06:05 PM	Helium MFC set to  0.000000
9/2/2010	1:06:05 PM	H2 MFC set to  0.000000
9/2/2010	1:06:05 PM	BCl3 MFC set to  0.000000
9/2/2010	1:06:05 PM	PHl3 MFC set to  0.000000
9/2/2010	1:06:05 PM	SiCl4 MFC set to  0.000000
9/2/2010	1:06:05 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	1:06:06 PM	Tube furnace set to 0
9/2/2010	1:07:06 PM	H2 valve closed
9/2/2010	1:07:06 PM	BCl3 valve closed
9/2/2010	1:07:06 PM	PH3 valve closed
9/2/2010	1:07:06 PM	SiCl4 pre valve closed
9/2/2010	1:07:06 PM	SiCl4 post valve closed
9/2/2010	1:07:06 PM	Bubbler valve closed
9/2/2010	1:07:06 PM	Helium valve opened
9/2/2010	1:07:06 PM	Main Vac valve opened
9/2/2010	1:07:06 PM	Bypass valve opened
9/2/2010	1:07:06 PM	Helium MFC set to  100.000000
9/2/2010	1:07:06 PM	H2 MFC set to  0.000000
9/2/2010	1:07:06 PM	BCl3 MFC set to  0.000000
9/2/2010	1:07:06 PM	PHl3 MFC set to  0.000000
9/2/2010	1:07:06 PM	SiCl4 MFC set to  0.000000
9/2/2010	1:07:06 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	1:07:06 PM	Tube furnace set to 0
9/2/2010	1:16:06 PM	Helium valve closed
9/2/2010	1:16:06 PM	H2 valve closed
9/2/2010	1:16:06 PM	BCl3 valve closed
9/2/2010	1:16:06 PM	PH3 valve closed
9/2/2010	1:16:06 PM	SiCl4 pre valve closed
9/2/2010	1:16:06 PM	SiCl4 post valve closed
9/2/2010	1:16:06 PM	Bubbler valve closed
9/2/2010	1:16:06 PM	Main Vac valve opened
9/2/2010	1:16:06 PM	Bypass valve opened
9/2/2010	1:16:06 PM	Helium MFC set to  0.000000
9/2/2010	1:16:06 PM	H2 MFC set to  0.000000
9/2/2010	1:16:06 PM	BCl3 MFC set to  0.000000
9/2/2010	1:16:06 PM	PHl3 MFC set to  0.000000
9/2/2010	1:16:06 PM	SiCl4 MFC set to  0.000000
9/2/2010	1:16:06 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	1:16:06 PM	Tube furnace set to 0
9/2/2010	1:17:06 PM	H2 valve closed
9/2/2010	1:17:06 PM	BCl3 valve closed
9/2/2010	1:17:06 PM	PH3 valve closed
9/2/2010	1:17:06 PM	SiCl4 pre valve closed
9/2/2010	1:17:06 PM	SiCl4 post valve closed
9/2/2010	1:17:06 PM	Bubbler valve closed
9/2/2010	1:17:06 PM	Helium valve opened
9/2/2010	1:17:06 PM	Main Vac valve opened
9/2/2010	1:17:06 PM	Bypass valve opened
9/2/2010	1:17:06 PM	Helium MFC set to  100.000000
9/2/2010	1:17:06 PM	H2 MFC set to  0.000000
9/2/2010	1:17:06 PM	BCl3 MFC set to  0.000000
9/2/2010	1:17:06 PM	PHl3 MFC set to  0.000000
9/2/2010	1:17:06 PM	SiCl4 MFC set to  0.000000
9/2/2010	1:17:06 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	1:17:06 PM	Tube furnace set to 0
9/2/2010	1:26:06 PM	Helium valve closed
9/2/2010	1:26:06 PM	H2 valve closed
9/2/2010	1:26:06 PM	BCl3 valve closed
9/2/2010	1:26:06 PM	PH3 valve closed
9/2/2010	1:26:06 PM	SiCl4 pre valve closed
9/2/2010	1:26:06 PM	SiCl4 post valve closed
9/2/2010	1:26:06 PM	Bubbler valve closed
9/2/2010	1:26:06 PM	Main Vac valve opened
9/2/2010	1:26:06 PM	Bypass valve opened
9/2/2010	1:26:06 PM	Helium MFC set to  0.000000
9/2/2010	1:26:06 PM	H2 MFC set to  0.000000
9/2/2010	1:26:06 PM	BCl3 MFC set to  0.000000
9/2/2010	1:26:06 PM	PHl3 MFC set to  0.000000
9/2/2010	1:26:06 PM	SiCl4 MFC set to  0.000000
9/2/2010	1:26:06 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	1:26:06 PM	Tube furnace set to 0
9/2/2010	1:27:06 PM	H2 valve closed
9/2/2010	1:27:06 PM	BCl3 valve closed
9/2/2010	1:27:06 PM	PH3 valve closed
9/2/2010	1:27:06 PM	SiCl4 pre valve closed
9/2/2010	1:27:06 PM	SiCl4 post valve closed
9/2/2010	1:27:06 PM	Bubbler valve closed
9/2/2010	1:27:06 PM	Helium valve opened
9/2/2010	1:27:06 PM	Main Vac valve opened
9/2/2010	1:27:06 PM	Bypass valve opened
9/2/2010	1:27:06 PM	Helium MFC set to  100.000000
9/2/2010	1:27:06 PM	H2 MFC set to  0.000000
9/2/2010	1:27:06 PM	BCl3 MFC set to  0.000000
9/2/2010	1:27:06 PM	PHl3 MFC set to  0.000000
9/2/2010	1:27:06 PM	SiCl4 MFC set to  0.000000
9/2/2010	1:27:06 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	1:27:07 PM	Tube furnace set to 0
9/2/2010	1:28:57 PM	Helium valve closed
9/2/2010	1:28:57 PM	H2 valve closed
9/2/2010	1:28:57 PM	BCl3 valve closed
9/2/2010	1:28:57 PM	PH3 valve closed
9/2/2010	1:28:57 PM	SiCl4 pre valve closed
9/2/2010	1:28:57 PM	SiCl4 post valve closed
9/2/2010	1:28:57 PM	Bubbler valve closed
9/2/2010	1:28:57 PM	Main Vac valve opened
9/2/2010	1:28:57 PM	Bypass valve opened
9/2/2010	1:28:57 PM	Helium MFC set to  0.000000
9/2/2010	1:28:57 PM	H2 MFC set to  0.000000
9/2/2010	1:28:57 PM	BCl3 MFC set to  0.000000
9/2/2010	1:28:57 PM	PHl3 MFC set to  0.000000
9/2/2010	1:28:57 PM	SiCl4 MFC set to  0.000000
9/2/2010	1:28:57 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	1:28:57 PM	Tube furnace set to 0
9/2/2010	1:28:57 PM	Run finished at 1:28 PM
9/2/2010	1:28:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	1:30:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	1:30:12 PM	Recipe started at 1:30 PM
9/2/2010	1:30:12 PM	Helium valve closed
9/2/2010	1:30:12 PM	H2 valve closed
9/2/2010	1:30:12 PM	BCl3 valve closed
9/2/2010	1:30:12 PM	PH3 valve closed
9/2/2010	1:30:12 PM	SiCl4 pre valve closed
9/2/2010	1:30:12 PM	SiCl4 post valve closed
9/2/2010	1:30:12 PM	Main Vac valve closed
9/2/2010	1:30:12 PM	Bubbler valve closed
9/2/2010	1:30:12 PM	Bypass valve opened
9/2/2010	1:30:12 PM	Helium MFC set to  0.000000
9/2/2010	1:30:12 PM	H2 MFC set to  0.000000
9/2/2010	1:30:12 PM	BCl3 MFC set to  0.000000
9/2/2010	1:30:12 PM	PHl3 MFC set to  0.000000
9/2/2010	1:30:12 PM	SiCl4 MFC set to  0.000000
9/2/2010	1:30:12 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	1:30:12 PM	Tube furnace set to 0
9/2/2010	1:30:12 PM	Helium valve closed
9/2/2010	1:30:12 PM	H2 valve closed
9/2/2010	1:30:12 PM	BCl3 valve closed
9/2/2010	1:30:12 PM	PH3 valve closed
9/2/2010	1:30:12 PM	SiCl4 pre valve closed
9/2/2010	1:30:12 PM	SiCl4 post valve closed
9/2/2010	1:30:12 PM	Bubbler valve closed
9/2/2010	1:30:12 PM	Main Vac valve opened
9/2/2010	1:30:12 PM	Bypass valve opened
9/2/2010	1:30:12 PM	Helium MFC set to  0.000000
9/2/2010	1:30:12 PM	H2 MFC set to  0.000000
9/2/2010	1:30:12 PM	BCl3 MFC set to  0.000000
9/2/2010	1:30:12 PM	PHl3 MFC set to  0.000000
9/2/2010	1:30:12 PM	SiCl4 MFC set to  0.000000
9/2/2010	1:30:12 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	1:30:13 PM	Tube furnace set to 0
9/2/2010	1:31:13 PM	H2 valve closed
9/2/2010	1:31:13 PM	BCl3 valve closed
9/2/2010	1:31:13 PM	PH3 valve closed
9/2/2010	1:31:13 PM	SiCl4 pre valve closed
9/2/2010	1:31:13 PM	SiCl4 post valve closed
9/2/2010	1:31:13 PM	Bubbler valve closed
9/2/2010	1:31:13 PM	Helium valve opened
9/2/2010	1:31:13 PM	Main Vac valve opened
9/2/2010	1:31:13 PM	Bypass valve opened
9/2/2010	1:31:13 PM	Helium MFC set to  100.000000
9/2/2010	1:31:13 PM	H2 MFC set to  0.000000
9/2/2010	1:31:13 PM	BCl3 MFC set to  0.000000
9/2/2010	1:31:13 PM	PHl3 MFC set to  0.000000
9/2/2010	1:31:13 PM	SiCl4 MFC set to  0.000000
9/2/2010	1:31:13 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	1:31:13 PM	Tube furnace set to 0
9/2/2010	1:40:13 PM	Helium valve closed
9/2/2010	1:40:13 PM	H2 valve closed
9/2/2010	1:40:13 PM	BCl3 valve closed
9/2/2010	1:40:13 PM	PH3 valve closed
9/2/2010	1:40:13 PM	SiCl4 pre valve closed
9/2/2010	1:40:13 PM	SiCl4 post valve closed
9/2/2010	1:40:13 PM	Bubbler valve closed
9/2/2010	1:40:13 PM	Main Vac valve opened
9/2/2010	1:40:13 PM	Bypass valve opened
9/2/2010	1:40:13 PM	Helium MFC set to  0.000000
9/2/2010	1:40:13 PM	H2 MFC set to  0.000000
9/2/2010	1:40:13 PM	BCl3 MFC set to  0.000000
9/2/2010	1:40:13 PM	PHl3 MFC set to  0.000000
9/2/2010	1:40:13 PM	SiCl4 MFC set to  0.000000
9/2/2010	1:40:13 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	1:40:13 PM	Tube furnace set to 0
9/2/2010	1:41:13 PM	H2 valve closed
9/2/2010	1:41:13 PM	BCl3 valve closed
9/2/2010	1:41:13 PM	PH3 valve closed
9/2/2010	1:41:13 PM	SiCl4 pre valve closed
9/2/2010	1:41:13 PM	SiCl4 post valve closed
9/2/2010	1:41:13 PM	Bubbler valve closed
9/2/2010	1:41:13 PM	Helium valve opened
9/2/2010	1:41:13 PM	Main Vac valve opened
9/2/2010	1:41:13 PM	Bypass valve opened
9/2/2010	1:41:13 PM	Helium MFC set to  100.000000
9/2/2010	1:41:13 PM	H2 MFC set to  0.000000
9/2/2010	1:41:13 PM	BCl3 MFC set to  0.000000
9/2/2010	1:41:13 PM	PHl3 MFC set to  0.000000
9/2/2010	1:41:13 PM	SiCl4 MFC set to  0.000000
9/2/2010	1:41:13 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	1:41:13 PM	Tube furnace set to 0
9/2/2010	1:50:13 PM	Helium valve closed
9/2/2010	1:50:13 PM	H2 valve closed
9/2/2010	1:50:13 PM	BCl3 valve closed
9/2/2010	1:50:13 PM	PH3 valve closed
9/2/2010	1:50:13 PM	SiCl4 pre valve closed
9/2/2010	1:50:13 PM	SiCl4 post valve closed
9/2/2010	1:50:13 PM	Bubbler valve closed
9/2/2010	1:50:13 PM	Main Vac valve opened
9/2/2010	1:50:13 PM	Bypass valve opened
9/2/2010	1:50:13 PM	Helium MFC set to  0.000000
9/2/2010	1:50:13 PM	H2 MFC set to  0.000000
9/2/2010	1:50:13 PM	BCl3 MFC set to  0.000000
9/2/2010	1:50:13 PM	PHl3 MFC set to  0.000000
9/2/2010	1:50:13 PM	SiCl4 MFC set to  0.000000
9/2/2010	1:50:13 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	1:50:13 PM	Tube furnace set to 0
9/2/2010	1:51:13 PM	H2 valve closed
9/2/2010	1:51:13 PM	BCl3 valve closed
9/2/2010	1:51:13 PM	PH3 valve closed
9/2/2010	1:51:13 PM	SiCl4 pre valve closed
9/2/2010	1:51:13 PM	SiCl4 post valve closed
9/2/2010	1:51:13 PM	Bubbler valve closed
9/2/2010	1:51:13 PM	Helium valve opened
9/2/2010	1:51:13 PM	Main Vac valve opened
9/2/2010	1:51:13 PM	Bypass valve opened
9/2/2010	1:51:13 PM	Helium MFC set to  100.000000
9/2/2010	1:51:13 PM	H2 MFC set to  0.000000
9/2/2010	1:51:13 PM	BCl3 MFC set to  0.000000
9/2/2010	1:51:13 PM	PHl3 MFC set to  0.000000
9/2/2010	1:51:14 PM	SiCl4 MFC set to  0.000000
9/2/2010	1:51:14 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	1:51:14 PM	Tube furnace set to 0
9/2/2010	1:58:26 PM	Helium valve closed
9/2/2010	1:58:26 PM	H2 valve closed
9/2/2010	1:58:26 PM	BCl3 valve closed
9/2/2010	1:58:26 PM	PH3 valve closed
9/2/2010	1:58:26 PM	SiCl4 pre valve closed
9/2/2010	1:58:26 PM	SiCl4 post valve closed
9/2/2010	1:58:26 PM	Bubbler valve closed
9/2/2010	1:58:26 PM	Main Vac valve opened
9/2/2010	1:58:26 PM	Bypass valve opened
9/2/2010	1:58:26 PM	Helium MFC set to  0.000000
9/2/2010	1:58:26 PM	H2 MFC set to  0.000000
9/2/2010	1:58:26 PM	BCl3 MFC set to  0.000000
9/2/2010	1:58:26 PM	PHl3 MFC set to  0.000000
9/2/2010	1:58:26 PM	SiCl4 MFC set to  0.000000
9/2/2010	1:58:26 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	1:58:26 PM	Tube furnace set to 0
9/2/2010	1:58:27 PM	Run finished at 1:58 PM
9/2/2010	1:58:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	2:01:03 PM	Recipe started at 2:01 PM
9/2/2010	2:01:03 PM	Helium valve closed
9/2/2010	2:01:03 PM	BCl3 valve closed
9/2/2010	2:01:03 PM	PH3 valve closed
9/2/2010	2:01:03 PM	SiCl4 pre valve closed
9/2/2010	2:01:03 PM	SiCl4 post valve closed
9/2/2010	2:01:03 PM	Main Vac valve closed
9/2/2010	2:01:03 PM	Bypass valve closed
9/2/2010	2:01:03 PM	Bubbler valve closed
9/2/2010	2:01:03 PM	H2 valve opened
9/2/2010	2:01:03 PM	Helium MFC set to  0.000000
9/2/2010	2:01:03 PM	H2 MFC set to  500.000000
9/2/2010	2:01:03 PM	BCl3 MFC set to  0.000000
9/2/2010	2:01:03 PM	PHl3 MFC set to  0.000000
9/2/2010	2:01:03 PM	SiCl4 MFC set to  0.000000
9/2/2010	2:01:03 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	2:01:04 PM	Tube furnace set to 0
9/2/2010	2:02:22 PM	Helium valve closed
9/2/2010	2:02:22 PM	BCl3 valve closed
9/2/2010	2:02:22 PM	PH3 valve closed
9/2/2010	2:02:22 PM	SiCl4 pre valve closed
9/2/2010	2:02:22 PM	SiCl4 post valve closed
9/2/2010	2:02:22 PM	Main Vac valve closed
9/2/2010	2:02:22 PM	Bypass valve closed
9/2/2010	2:02:22 PM	H2 valve opened
9/2/2010	2:02:22 PM	Bubbler valve opened
9/2/2010	2:02:22 PM	Helium MFC set to  0.000000
9/2/2010	2:02:22 PM	H2 MFC set to  500.000000
9/2/2010	2:02:22 PM	BCl3 MFC set to  0.000000
9/2/2010	2:02:22 PM	PHl3 MFC set to  0.000000
9/2/2010	2:02:22 PM	SiCl4 MFC set to  0.000000
9/2/2010	2:02:22 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	2:02:22 PM	Tube furnace set to 1000
9/2/2010	2:22:22 PM	Helium valve closed
9/2/2010	2:22:22 PM	PH3 valve closed
9/2/2010	2:22:22 PM	Main Vac valve closed
9/2/2010	2:22:22 PM	Bypass valve closed
9/2/2010	2:22:22 PM	H2 valve opened
9/2/2010	2:22:23 PM	BCl3 valve opened
9/2/2010	2:22:23 PM	SiCl4 pre valve opened
9/2/2010	2:22:23 PM	SiCl4 post valve opened
9/2/2010	2:22:23 PM	Bubbler valve opened
9/2/2010	2:22:23 PM	Helium MFC set to  0.000000
9/2/2010	2:22:23 PM	H2 MFC set to  500.000000
9/2/2010	2:22:23 PM	BCl3 MFC set to  12.000000
9/2/2010	2:22:23 PM	PHl3 MFC set to  0.000000
9/2/2010	2:22:23 PM	SiCl4 MFC set to  50.000000
9/2/2010	2:22:23 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	2:22:23 PM	Tube furnace set to 1000
9/2/2010	2:35:43 PM	H2 valve closed
9/2/2010	2:35:43 PM	BCl3 valve closed
9/2/2010	2:35:43 PM	PH3 valve closed
9/2/2010	2:35:43 PM	SiCl4 pre valve closed
9/2/2010	2:35:43 PM	SiCl4 post valve closed
9/2/2010	2:35:43 PM	Main Vac valve closed
9/2/2010	2:35:43 PM	Bypass valve closed
9/2/2010	2:35:43 PM	Helium valve opened
9/2/2010	2:35:43 PM	Bubbler valve opened
9/2/2010	2:35:43 PM	Helium MFC set to  500.000000
9/2/2010	2:35:43 PM	H2 MFC set to  0.000000
9/2/2010	2:35:43 PM	BCl3 MFC set to  0.000000
9/2/2010	2:35:43 PM	PHl3 MFC set to  0.000000
9/2/2010	2:35:43 PM	SiCl4 MFC set to  0.000000
9/2/2010	2:35:43 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	2:35:43 PM	Tube furnace set to 0
9/2/2010	2:55:43 PM	Helium valve closed
9/2/2010	2:55:43 PM	H2 valve closed
9/2/2010	2:55:43 PM	BCl3 valve closed
9/2/2010	2:55:43 PM	PH3 valve closed
9/2/2010	2:55:43 PM	SiCl4 pre valve closed
9/2/2010	2:55:43 PM	SiCl4 post valve closed
9/2/2010	2:55:43 PM	Main Vac valve closed
9/2/2010	2:55:43 PM	Bypass valve closed
9/2/2010	2:55:43 PM	Bubbler valve closed
9/2/2010	2:55:43 PM	Helium MFC set to  0.000000
9/2/2010	2:55:43 PM	H2 MFC set to  0.000000
9/2/2010	2:55:43 PM	BCl3 MFC set to  0.000000
9/2/2010	2:55:43 PM	PHl3 MFC set to  0.000000
9/2/2010	2:55:43 PM	SiCl4 MFC set to  0.000000
9/2/2010	2:55:43 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	2:55:43 PM	Tube furnace set to 0
9/2/2010	2:55:43 PM	Run finished at 2:55 PM
9/2/2010	3:06:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/2/2010	3:06:28 PM	Recipe started at 3:06 PM
9/2/2010	3:06:28 PM	Helium valve closed
9/2/2010	3:06:28 PM	H2 valve closed
9/2/2010	3:06:28 PM	BCl3 valve closed
9/2/2010	3:06:28 PM	PH3 valve closed
9/2/2010	3:06:28 PM	SiCl4 pre valve closed
9/2/2010	3:06:28 PM	SiCl4 post valve closed
9/2/2010	3:06:28 PM	Main Vac valve closed
9/2/2010	3:06:28 PM	Bubbler valve closed
9/2/2010	3:06:28 PM	Bypass valve opened
9/2/2010	3:06:28 PM	Helium MFC set to  0.000000
9/2/2010	3:06:28 PM	H2 MFC set to  0.000000
9/2/2010	3:06:28 PM	BCl3 MFC set to  0.000000
9/2/2010	3:06:28 PM	PHl3 MFC set to  0.000000
9/2/2010	3:06:28 PM	SiCl4 MFC set to  0.000000
9/2/2010	3:06:28 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	3:06:28 PM	Tube furnace set to 0
9/2/2010	3:07:07 PM	Helium valve closed
9/2/2010	3:07:07 PM	H2 valve closed
9/2/2010	3:07:07 PM	BCl3 valve closed
9/2/2010	3:07:07 PM	PH3 valve closed
9/2/2010	3:07:07 PM	SiCl4 pre valve closed
9/2/2010	3:07:07 PM	SiCl4 post valve closed
9/2/2010	3:07:07 PM	Bubbler valve closed
9/2/2010	3:07:07 PM	Main Vac valve opened
9/2/2010	3:07:07 PM	Bypass valve opened
9/2/2010	3:07:07 PM	Helium MFC set to  0.000000
9/2/2010	3:07:07 PM	H2 MFC set to  0.000000
9/2/2010	3:07:07 PM	BCl3 MFC set to  0.000000
9/2/2010	3:07:07 PM	PHl3 MFC set to  0.000000
9/2/2010	3:07:07 PM	SiCl4 MFC set to  0.000000
9/2/2010	3:07:07 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	3:07:07 PM	Tube furnace set to 0
9/2/2010	3:07:08 PM	Run finished at 3:07 PM
9/2/2010	3:07:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/2/2010	3:27:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	3:27:44 PM	Recipe started at 3:27 PM
9/2/2010	3:27:44 PM	Helium valve closed
9/2/2010	3:27:44 PM	H2 valve closed
9/2/2010	3:27:44 PM	BCl3 valve closed
9/2/2010	3:27:44 PM	PH3 valve closed
9/2/2010	3:27:44 PM	SiCl4 pre valve closed
9/2/2010	3:27:44 PM	SiCl4 post valve closed
9/2/2010	3:27:44 PM	Main Vac valve closed
9/2/2010	3:27:44 PM	Bubbler valve closed
9/2/2010	3:27:44 PM	Bypass valve opened
9/2/2010	3:27:44 PM	Helium MFC set to  0.000000
9/2/2010	3:27:44 PM	H2 MFC set to  0.000000
9/2/2010	3:27:44 PM	BCl3 MFC set to  0.000000
9/2/2010	3:27:44 PM	PHl3 MFC set to  0.000000
9/2/2010	3:27:44 PM	SiCl4 MFC set to  0.000000
9/2/2010	3:27:44 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	3:27:44 PM	Tube furnace set to 0
9/2/2010	3:27:44 PM	Helium valve closed
9/2/2010	3:27:44 PM	H2 valve closed
9/2/2010	3:27:44 PM	BCl3 valve closed
9/2/2010	3:27:44 PM	PH3 valve closed
9/2/2010	3:27:44 PM	SiCl4 pre valve closed
9/2/2010	3:27:44 PM	SiCl4 post valve closed
9/2/2010	3:27:44 PM	Bubbler valve closed
9/2/2010	3:27:44 PM	Main Vac valve opened
9/2/2010	3:27:44 PM	Bypass valve opened
9/2/2010	3:27:44 PM	Helium MFC set to  0.000000
9/2/2010	3:27:44 PM	H2 MFC set to  0.000000
9/2/2010	3:27:44 PM	BCl3 MFC set to  0.000000
9/2/2010	3:27:44 PM	PHl3 MFC set to  0.000000
9/2/2010	3:27:44 PM	SiCl4 MFC set to  0.000000
9/2/2010	3:27:44 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	3:27:44 PM	Tube furnace set to 0
9/2/2010	3:28:44 PM	H2 valve closed
9/2/2010	3:28:44 PM	BCl3 valve closed
9/2/2010	3:28:44 PM	PH3 valve closed
9/2/2010	3:28:44 PM	SiCl4 pre valve closed
9/2/2010	3:28:44 PM	SiCl4 post valve closed
9/2/2010	3:28:44 PM	Bubbler valve closed
9/2/2010	3:28:44 PM	Helium valve opened
9/2/2010	3:28:44 PM	Main Vac valve opened
9/2/2010	3:28:44 PM	Bypass valve opened
9/2/2010	3:28:44 PM	Helium MFC set to  100.000000
9/2/2010	3:28:44 PM	H2 MFC set to  0.000000
9/2/2010	3:28:44 PM	BCl3 MFC set to  0.000000
9/2/2010	3:28:44 PM	PHl3 MFC set to  0.000000
9/2/2010	3:28:44 PM	SiCl4 MFC set to  0.000000
9/2/2010	3:28:44 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	3:28:45 PM	Tube furnace set to 0
9/2/2010	3:37:45 PM	Helium valve closed
9/2/2010	3:37:45 PM	H2 valve closed
9/2/2010	3:37:45 PM	BCl3 valve closed
9/2/2010	3:37:45 PM	PH3 valve closed
9/2/2010	3:37:45 PM	SiCl4 pre valve closed
9/2/2010	3:37:45 PM	SiCl4 post valve closed
9/2/2010	3:37:45 PM	Bubbler valve closed
9/2/2010	3:37:45 PM	Main Vac valve opened
9/2/2010	3:37:45 PM	Bypass valve opened
9/2/2010	3:37:45 PM	Helium MFC set to  0.000000
9/2/2010	3:37:45 PM	H2 MFC set to  0.000000
9/2/2010	3:37:45 PM	BCl3 MFC set to  0.000000
9/2/2010	3:37:45 PM	PHl3 MFC set to  0.000000
9/2/2010	3:37:45 PM	SiCl4 MFC set to  0.000000
9/2/2010	3:37:45 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	3:37:45 PM	Tube furnace set to 0
9/2/2010	3:38:45 PM	H2 valve closed
9/2/2010	3:38:45 PM	BCl3 valve closed
9/2/2010	3:38:45 PM	PH3 valve closed
9/2/2010	3:38:45 PM	SiCl4 pre valve closed
9/2/2010	3:38:45 PM	SiCl4 post valve closed
9/2/2010	3:38:45 PM	Bubbler valve closed
9/2/2010	3:38:45 PM	Helium valve opened
9/2/2010	3:38:45 PM	Main Vac valve opened
9/2/2010	3:38:45 PM	Bypass valve opened
9/2/2010	3:38:45 PM	Helium MFC set to  100.000000
9/2/2010	3:38:45 PM	H2 MFC set to  0.000000
9/2/2010	3:38:45 PM	BCl3 MFC set to  0.000000
9/2/2010	3:38:45 PM	PHl3 MFC set to  0.000000
9/2/2010	3:38:45 PM	SiCl4 MFC set to  0.000000
9/2/2010	3:38:45 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	3:38:45 PM	Tube furnace set to 0
9/2/2010	3:47:45 PM	Helium valve closed
9/2/2010	3:47:45 PM	H2 valve closed
9/2/2010	3:47:45 PM	BCl3 valve closed
9/2/2010	3:47:45 PM	PH3 valve closed
9/2/2010	3:47:45 PM	SiCl4 pre valve closed
9/2/2010	3:47:45 PM	SiCl4 post valve closed
9/2/2010	3:47:45 PM	Bubbler valve closed
9/2/2010	3:47:45 PM	Main Vac valve opened
9/2/2010	3:47:45 PM	Bypass valve opened
9/2/2010	3:47:45 PM	Helium MFC set to  0.000000
9/2/2010	3:47:45 PM	H2 MFC set to  0.000000
9/2/2010	3:47:45 PM	BCl3 MFC set to  0.000000
9/2/2010	3:47:45 PM	PHl3 MFC set to  0.000000
9/2/2010	3:47:45 PM	SiCl4 MFC set to  0.000000
9/2/2010	3:47:45 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	3:47:45 PM	Tube furnace set to 0
9/2/2010	3:48:45 PM	H2 valve closed
9/2/2010	3:48:45 PM	BCl3 valve closed
9/2/2010	3:48:45 PM	PH3 valve closed
9/2/2010	3:48:45 PM	SiCl4 pre valve closed
9/2/2010	3:48:45 PM	SiCl4 post valve closed
9/2/2010	3:48:45 PM	Bubbler valve closed
9/2/2010	3:48:45 PM	Helium valve opened
9/2/2010	3:48:45 PM	Main Vac valve opened
9/2/2010	3:48:45 PM	Bypass valve opened
9/2/2010	3:48:45 PM	Helium MFC set to  100.000000
9/2/2010	3:48:45 PM	H2 MFC set to  0.000000
9/2/2010	3:48:45 PM	BCl3 MFC set to  0.000000
9/2/2010	3:48:45 PM	PHl3 MFC set to  0.000000
9/2/2010	3:48:45 PM	SiCl4 MFC set to  0.000000
9/2/2010	3:48:45 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	3:48:45 PM	Tube furnace set to 0
9/2/2010	3:53:21 PM	Helium valve closed
9/2/2010	3:53:21 PM	H2 valve closed
9/2/2010	3:53:21 PM	BCl3 valve closed
9/2/2010	3:53:21 PM	PH3 valve closed
9/2/2010	3:53:21 PM	SiCl4 pre valve closed
9/2/2010	3:53:21 PM	SiCl4 post valve closed
9/2/2010	3:53:21 PM	Bubbler valve closed
9/2/2010	3:53:21 PM	Main Vac valve opened
9/2/2010	3:53:21 PM	Bypass valve opened
9/2/2010	3:53:21 PM	Helium MFC set to  0.000000
9/2/2010	3:53:21 PM	H2 MFC set to  0.000000
9/2/2010	3:53:21 PM	BCl3 MFC set to  0.000000
9/2/2010	3:53:21 PM	PHl3 MFC set to  0.000000
9/2/2010	3:53:21 PM	SiCl4 MFC set to  0.000000
9/2/2010	3:53:21 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	3:53:22 PM	Tube furnace set to 0
9/2/2010	3:53:22 PM	Run finished at 3:53 PM
9/2/2010	3:53:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	3:54:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	3:54:14 PM	Recipe started at 3:54 PM
9/2/2010	3:54:14 PM	Helium valve closed
9/2/2010	3:54:14 PM	H2 valve closed
9/2/2010	3:54:14 PM	BCl3 valve closed
9/2/2010	3:54:14 PM	PH3 valve closed
9/2/2010	3:54:14 PM	SiCl4 pre valve closed
9/2/2010	3:54:14 PM	SiCl4 post valve closed
9/2/2010	3:54:14 PM	Main Vac valve closed
9/2/2010	3:54:14 PM	Bubbler valve closed
9/2/2010	3:54:14 PM	Bypass valve opened
9/2/2010	3:54:14 PM	Helium MFC set to  0.000000
9/2/2010	3:54:14 PM	H2 MFC set to  0.000000
9/2/2010	3:54:14 PM	BCl3 MFC set to  0.000000
9/2/2010	3:54:14 PM	PHl3 MFC set to  0.000000
9/2/2010	3:54:14 PM	SiCl4 MFC set to  0.000000
9/2/2010	3:54:14 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	3:54:14 PM	Tube furnace set to 0
9/2/2010	3:54:14 PM	Helium valve closed
9/2/2010	3:54:14 PM	H2 valve closed
9/2/2010	3:54:14 PM	BCl3 valve closed
9/2/2010	3:54:14 PM	PH3 valve closed
9/2/2010	3:54:14 PM	SiCl4 pre valve closed
9/2/2010	3:54:14 PM	SiCl4 post valve closed
9/2/2010	3:54:14 PM	Bubbler valve closed
9/2/2010	3:54:14 PM	Main Vac valve opened
9/2/2010	3:54:14 PM	Bypass valve opened
9/2/2010	3:54:14 PM	Helium MFC set to  0.000000
9/2/2010	3:54:14 PM	H2 MFC set to  0.000000
9/2/2010	3:54:14 PM	BCl3 MFC set to  0.000000
9/2/2010	3:54:14 PM	PHl3 MFC set to  0.000000
9/2/2010	3:54:14 PM	SiCl4 MFC set to  0.000000
9/2/2010	3:54:14 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	3:54:14 PM	Tube furnace set to 0
9/2/2010	3:55:14 PM	H2 valve closed
9/2/2010	3:55:14 PM	BCl3 valve closed
9/2/2010	3:55:14 PM	PH3 valve closed
9/2/2010	3:55:14 PM	SiCl4 pre valve closed
9/2/2010	3:55:14 PM	SiCl4 post valve closed
9/2/2010	3:55:14 PM	Bubbler valve closed
9/2/2010	3:55:14 PM	Helium valve opened
9/2/2010	3:55:14 PM	Main Vac valve opened
9/2/2010	3:55:14 PM	Bypass valve opened
9/2/2010	3:55:14 PM	Helium MFC set to  100.000000
9/2/2010	3:55:14 PM	H2 MFC set to  0.000000
9/2/2010	3:55:14 PM	BCl3 MFC set to  0.000000
9/2/2010	3:55:14 PM	PHl3 MFC set to  0.000000
9/2/2010	3:55:14 PM	SiCl4 MFC set to  0.000000
9/2/2010	3:55:14 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	3:55:14 PM	Tube furnace set to 0
9/2/2010	4:04:14 PM	Helium valve closed
9/2/2010	4:04:14 PM	H2 valve closed
9/2/2010	4:04:14 PM	BCl3 valve closed
9/2/2010	4:04:14 PM	PH3 valve closed
9/2/2010	4:04:15 PM	SiCl4 pre valve closed
9/2/2010	4:04:15 PM	SiCl4 post valve closed
9/2/2010	4:04:15 PM	Bubbler valve closed
9/2/2010	4:04:15 PM	Main Vac valve opened
9/2/2010	4:04:15 PM	Bypass valve opened
9/2/2010	4:04:15 PM	Helium MFC set to  0.000000
9/2/2010	4:04:15 PM	H2 MFC set to  0.000000
9/2/2010	4:04:15 PM	BCl3 MFC set to  0.000000
9/2/2010	4:04:15 PM	PHl3 MFC set to  0.000000
9/2/2010	4:04:15 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:04:15 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	4:04:15 PM	Tube furnace set to 0
9/2/2010	4:05:15 PM	H2 valve closed
9/2/2010	4:05:15 PM	BCl3 valve closed
9/2/2010	4:05:15 PM	PH3 valve closed
9/2/2010	4:05:15 PM	SiCl4 pre valve closed
9/2/2010	4:05:15 PM	SiCl4 post valve closed
9/2/2010	4:05:15 PM	Bubbler valve closed
9/2/2010	4:05:15 PM	Helium valve opened
9/2/2010	4:05:15 PM	Main Vac valve opened
9/2/2010	4:05:15 PM	Bypass valve opened
9/2/2010	4:05:15 PM	Helium MFC set to  100.000000
9/2/2010	4:05:15 PM	H2 MFC set to  0.000000
9/2/2010	4:05:15 PM	BCl3 MFC set to  0.000000
9/2/2010	4:05:15 PM	PHl3 MFC set to  0.000000
9/2/2010	4:05:15 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:05:15 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	4:05:15 PM	Tube furnace set to 0
9/2/2010	4:07:03 PM	Helium valve closed
9/2/2010	4:07:03 PM	H2 valve closed
9/2/2010	4:07:03 PM	BCl3 valve closed
9/2/2010	4:07:03 PM	PH3 valve closed
9/2/2010	4:07:03 PM	SiCl4 pre valve closed
9/2/2010	4:07:03 PM	SiCl4 post valve closed
9/2/2010	4:07:03 PM	Bubbler valve closed
9/2/2010	4:07:03 PM	Main Vac valve opened
9/2/2010	4:07:03 PM	Bypass valve opened
9/2/2010	4:07:03 PM	Helium MFC set to  0.000000
9/2/2010	4:07:03 PM	H2 MFC set to  0.000000
9/2/2010	4:07:03 PM	BCl3 MFC set to  0.000000
9/2/2010	4:07:03 PM	PHl3 MFC set to  0.000000
9/2/2010	4:07:03 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:07:03 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	4:07:03 PM	Tube furnace set to 0
9/2/2010	4:07:03 PM	H2 valve closed
9/2/2010	4:07:03 PM	BCl3 valve closed
9/2/2010	4:07:03 PM	PH3 valve closed
9/2/2010	4:07:03 PM	SiCl4 pre valve closed
9/2/2010	4:07:03 PM	SiCl4 post valve closed
9/2/2010	4:07:04 PM	Bubbler valve closed
9/2/2010	4:07:04 PM	Helium valve opened
9/2/2010	4:07:04 PM	Main Vac valve opened
9/2/2010	4:07:04 PM	Bypass valve opened
9/2/2010	4:07:04 PM	Helium MFC set to  100.000000
9/2/2010	4:07:04 PM	H2 MFC set to  0.000000
9/2/2010	4:07:04 PM	BCl3 MFC set to  0.000000
9/2/2010	4:07:04 PM	PHl3 MFC set to  0.000000
9/2/2010	4:07:04 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:07:04 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	4:07:04 PM	Tube furnace set to 0
9/2/2010	4:07:04 PM	Helium valve closed
9/2/2010	4:07:04 PM	H2 valve closed
9/2/2010	4:07:04 PM	BCl3 valve closed
9/2/2010	4:07:04 PM	PH3 valve closed
9/2/2010	4:07:04 PM	SiCl4 pre valve closed
9/2/2010	4:07:04 PM	SiCl4 post valve closed
9/2/2010	4:07:04 PM	Bubbler valve closed
9/2/2010	4:07:04 PM	Main Vac valve opened
9/2/2010	4:07:04 PM	Bypass valve opened
9/2/2010	4:07:04 PM	Helium MFC set to  0.000000
9/2/2010	4:07:04 PM	H2 MFC set to  0.000000
9/2/2010	4:07:04 PM	BCl3 MFC set to  0.000000
9/2/2010	4:07:04 PM	PHl3 MFC set to  0.000000
9/2/2010	4:07:04 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:07:04 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	4:07:04 PM	Tube furnace set to 0
9/2/2010	4:07:05 PM	Run finished at 4:07 PM
9/2/2010	4:07:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	4:29:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	4:29:22 PM	Recipe started at 4:29 PM
9/2/2010	4:29:22 PM	Helium valve closed
9/2/2010	4:29:22 PM	H2 valve closed
9/2/2010	4:29:22 PM	BCl3 valve closed
9/2/2010	4:29:22 PM	PH3 valve closed
9/2/2010	4:29:22 PM	SiCl4 pre valve closed
9/2/2010	4:29:22 PM	SiCl4 post valve closed
9/2/2010	4:29:22 PM	Main Vac valve closed
9/2/2010	4:29:22 PM	Bubbler valve closed
9/2/2010	4:29:22 PM	Bypass valve opened
9/2/2010	4:29:22 PM	Helium MFC set to  0.000000
9/2/2010	4:29:22 PM	H2 MFC set to  0.000000
9/2/2010	4:29:22 PM	BCl3 MFC set to  0.000000
9/2/2010	4:29:22 PM	PHl3 MFC set to  0.000000
9/2/2010	4:29:22 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:29:22 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	4:29:23 PM	Tube furnace set to 0
9/2/2010	4:29:23 PM	Helium valve closed
9/2/2010	4:29:23 PM	H2 valve closed
9/2/2010	4:29:23 PM	BCl3 valve closed
9/2/2010	4:29:23 PM	PH3 valve closed
9/2/2010	4:29:23 PM	SiCl4 pre valve closed
9/2/2010	4:29:23 PM	SiCl4 post valve closed
9/2/2010	4:29:23 PM	Bubbler valve closed
9/2/2010	4:29:23 PM	Main Vac valve opened
9/2/2010	4:29:23 PM	Bypass valve opened
9/2/2010	4:29:23 PM	Helium MFC set to  0.000000
9/2/2010	4:29:23 PM	H2 MFC set to  0.000000
9/2/2010	4:29:23 PM	BCl3 MFC set to  0.000000
9/2/2010	4:29:23 PM	PHl3 MFC set to  0.000000
9/2/2010	4:29:23 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:29:23 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	4:29:23 PM	Tube furnace set to 0
9/2/2010	4:30:23 PM	H2 valve closed
9/2/2010	4:30:23 PM	BCl3 valve closed
9/2/2010	4:30:23 PM	PH3 valve closed
9/2/2010	4:30:23 PM	SiCl4 pre valve closed
9/2/2010	4:30:23 PM	SiCl4 post valve closed
9/2/2010	4:30:23 PM	Bubbler valve closed
9/2/2010	4:30:23 PM	Helium valve opened
9/2/2010	4:30:23 PM	Main Vac valve opened
9/2/2010	4:30:23 PM	Bypass valve opened
9/2/2010	4:30:23 PM	Helium MFC set to  100.000000
9/2/2010	4:30:23 PM	H2 MFC set to  0.000000
9/2/2010	4:30:23 PM	BCl3 MFC set to  0.000000
9/2/2010	4:30:23 PM	PHl3 MFC set to  0.000000
9/2/2010	4:30:23 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:30:23 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	4:30:23 PM	Tube furnace set to 0
9/2/2010	4:39:23 PM	Helium valve closed
9/2/2010	4:39:23 PM	H2 valve closed
9/2/2010	4:39:23 PM	BCl3 valve closed
9/2/2010	4:39:23 PM	PH3 valve closed
9/2/2010	4:39:23 PM	SiCl4 pre valve closed
9/2/2010	4:39:23 PM	SiCl4 post valve closed
9/2/2010	4:39:23 PM	Bubbler valve closed
9/2/2010	4:39:23 PM	Main Vac valve opened
9/2/2010	4:39:23 PM	Bypass valve opened
9/2/2010	4:39:23 PM	Helium MFC set to  0.000000
9/2/2010	4:39:23 PM	H2 MFC set to  0.000000
9/2/2010	4:39:23 PM	BCl3 MFC set to  0.000000
9/2/2010	4:39:23 PM	PHl3 MFC set to  0.000000
9/2/2010	4:39:23 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:39:23 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	4:39:23 PM	Tube furnace set to 0
9/2/2010	4:40:23 PM	H2 valve closed
9/2/2010	4:40:23 PM	BCl3 valve closed
9/2/2010	4:40:23 PM	PH3 valve closed
9/2/2010	4:40:23 PM	SiCl4 pre valve closed
9/2/2010	4:40:23 PM	SiCl4 post valve closed
9/2/2010	4:40:23 PM	Bubbler valve closed
9/2/2010	4:40:23 PM	Helium valve opened
9/2/2010	4:40:23 PM	Main Vac valve opened
9/2/2010	4:40:23 PM	Bypass valve opened
9/2/2010	4:40:23 PM	Helium MFC set to  100.000000
9/2/2010	4:40:23 PM	H2 MFC set to  0.000000
9/2/2010	4:40:23 PM	BCl3 MFC set to  0.000000
9/2/2010	4:40:23 PM	PHl3 MFC set to  0.000000
9/2/2010	4:40:24 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:40:24 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	4:40:24 PM	Tube furnace set to 0
9/2/2010	4:44:46 PM	Helium valve closed
9/2/2010	4:44:46 PM	H2 valve closed
9/2/2010	4:44:46 PM	BCl3 valve closed
9/2/2010	4:44:46 PM	PH3 valve closed
9/2/2010	4:44:46 PM	SiCl4 pre valve closed
9/2/2010	4:44:46 PM	SiCl4 post valve closed
9/2/2010	4:44:46 PM	Bubbler valve closed
9/2/2010	4:44:46 PM	Main Vac valve opened
9/2/2010	4:44:46 PM	Bypass valve opened
9/2/2010	4:44:46 PM	Helium MFC set to  0.000000
9/2/2010	4:44:46 PM	H2 MFC set to  0.000000
9/2/2010	4:44:46 PM	BCl3 MFC set to  0.000000
9/2/2010	4:44:46 PM	PHl3 MFC set to  0.000000
9/2/2010	4:44:46 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:44:46 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	4:44:46 PM	Tube furnace set to 0
9/2/2010	4:44:47 PM	H2 valve closed
9/2/2010	4:44:47 PM	BCl3 valve closed
9/2/2010	4:44:47 PM	PH3 valve closed
9/2/2010	4:44:47 PM	SiCl4 pre valve closed
9/2/2010	4:44:47 PM	SiCl4 post valve closed
9/2/2010	4:44:47 PM	Bubbler valve closed
9/2/2010	4:44:47 PM	Helium valve opened
9/2/2010	4:44:47 PM	Main Vac valve opened
9/2/2010	4:44:47 PM	Bypass valve opened
9/2/2010	4:44:47 PM	Helium MFC set to  100.000000
9/2/2010	4:44:47 PM	H2 MFC set to  0.000000
9/2/2010	4:44:47 PM	BCl3 MFC set to  0.000000
9/2/2010	4:44:47 PM	PHl3 MFC set to  0.000000
9/2/2010	4:44:47 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:44:47 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	4:44:47 PM	Tube furnace set to 0
9/2/2010	4:44:48 PM	Helium valve closed
9/2/2010	4:44:48 PM	H2 valve closed
9/2/2010	4:44:48 PM	BCl3 valve closed
9/2/2010	4:44:48 PM	PH3 valve closed
9/2/2010	4:44:48 PM	SiCl4 pre valve closed
9/2/2010	4:44:48 PM	SiCl4 post valve closed
9/2/2010	4:44:48 PM	Bubbler valve closed
9/2/2010	4:44:48 PM	Main Vac valve opened
9/2/2010	4:44:48 PM	Bypass valve opened
9/2/2010	4:44:48 PM	Helium MFC set to  0.000000
9/2/2010	4:44:48 PM	H2 MFC set to  0.000000
9/2/2010	4:44:48 PM	BCl3 MFC set to  0.000000
9/2/2010	4:44:48 PM	PHl3 MFC set to  0.000000
9/2/2010	4:44:48 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:44:48 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	4:44:48 PM	Tube furnace set to 0
9/2/2010	4:44:49 PM	Run finished at 4:44 PM
9/2/2010	4:44:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	4:55:30 PM	Recipe started at 4:55 PM
9/2/2010	4:55:30 PM	Helium valve closed
9/2/2010	4:55:30 PM	BCl3 valve closed
9/2/2010	4:55:30 PM	PH3 valve closed
9/2/2010	4:55:30 PM	SiCl4 pre valve closed
9/2/2010	4:55:30 PM	SiCl4 post valve closed
9/2/2010	4:55:30 PM	Main Vac valve closed
9/2/2010	4:55:30 PM	Bypass valve closed
9/2/2010	4:55:30 PM	Bubbler valve closed
9/2/2010	4:55:30 PM	H2 valve opened
9/2/2010	4:55:30 PM	Helium MFC set to  0.000000
9/2/2010	4:55:30 PM	H2 MFC set to  500.000000
9/2/2010	4:55:30 PM	BCl3 MFC set to  0.000000
9/2/2010	4:55:30 PM	PHl3 MFC set to  0.000000
9/2/2010	4:55:30 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:55:30 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	4:55:30 PM	Tube furnace set to 0
9/2/2010	4:55:30 PM	Helium valve closed
9/2/2010	4:55:30 PM	BCl3 valve closed
9/2/2010	4:55:30 PM	PH3 valve closed
9/2/2010	4:55:30 PM	SiCl4 pre valve closed
9/2/2010	4:55:30 PM	SiCl4 post valve closed
9/2/2010	4:55:30 PM	Main Vac valve closed
9/2/2010	4:55:30 PM	Bypass valve closed
9/2/2010	4:55:30 PM	Bubbler valve closed
9/2/2010	4:55:30 PM	H2 valve opened
9/2/2010	4:55:30 PM	Helium MFC set to  0.000000
9/2/2010	4:55:30 PM	H2 MFC set to  500.000000
9/2/2010	4:55:30 PM	BCl3 MFC set to  0.000000
9/2/2010	4:55:30 PM	PHl3 MFC set to  0.000000
9/2/2010	4:55:30 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:55:30 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	4:55:30 PM	Tube furnace set to 1000
9/2/2010	4:55:31 PM	Helium valve closed
9/2/2010	4:55:31 PM	H2 valve closed
9/2/2010	4:55:31 PM	BCl3 valve closed
9/2/2010	4:55:31 PM	PH3 valve closed
9/2/2010	4:55:31 PM	SiCl4 pre valve closed
9/2/2010	4:55:31 PM	SiCl4 post valve closed
9/2/2010	4:55:31 PM	Main Vac valve closed
9/2/2010	4:55:31 PM	Bubbler valve closed
9/2/2010	4:55:31 PM	Bypass valve closed
9/2/2010	4:55:31 PM	Helium MFC set to  0.000000
9/2/2010	4:55:31 PM	H2 MFC set to  0.000000
9/2/2010	4:55:31 PM	BCl3 MFC set to  0.000000
9/2/2010	4:55:31 PM	PHl3 MFC set to  0.000000
9/2/2010	4:55:31 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:55:31 PM	Bypass solenoid MFC set to  760.000000
9/2/2010	4:55:31 PM	Tube furnace set to 0
9/2/2010	4:55:31 PM	Baratron reads 5.301319 Torr and NaOH valve is open.  Emergency exit.
9/2/2010	4:55:34 PM	Run aborted at 4:55 PM
9/2/2010	4:55:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/2/2010	4:55:38 PM	Recipe started at 4:55 PM
9/2/2010	4:55:38 PM	Helium valve closed
9/2/2010	4:55:38 PM	H2 valve closed
9/2/2010	4:55:38 PM	BCl3 valve closed
9/2/2010	4:55:38 PM	PH3 valve closed
9/2/2010	4:55:38 PM	SiCl4 pre valve closed
9/2/2010	4:55:38 PM	SiCl4 post valve closed
9/2/2010	4:55:38 PM	Main Vac valve closed
9/2/2010	4:55:38 PM	Bubbler valve closed
9/2/2010	4:55:38 PM	Bypass valve opened
9/2/2010	4:55:38 PM	Helium MFC set to  0.000000
9/2/2010	4:55:38 PM	H2 MFC set to  0.000000
9/2/2010	4:55:38 PM	BCl3 MFC set to  0.000000
9/2/2010	4:55:38 PM	PHl3 MFC set to  0.000000
9/2/2010	4:55:38 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:55:38 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	4:55:38 PM	Tube furnace set to 0
9/2/2010	4:55:39 PM	Helium valve closed
9/2/2010	4:55:39 PM	H2 valve closed
9/2/2010	4:55:39 PM	BCl3 valve closed
9/2/2010	4:55:39 PM	PH3 valve closed
9/2/2010	4:55:39 PM	SiCl4 pre valve closed
9/2/2010	4:55:39 PM	SiCl4 post valve closed
9/2/2010	4:55:39 PM	Bubbler valve closed
9/2/2010	4:55:39 PM	Main Vac valve opened
9/2/2010	4:55:39 PM	Bypass valve opened
9/2/2010	4:55:39 PM	Helium MFC set to  0.000000
9/2/2010	4:55:39 PM	H2 MFC set to  0.000000
9/2/2010	4:55:39 PM	BCl3 MFC set to  0.000000
9/2/2010	4:55:39 PM	PHl3 MFC set to  0.000000
9/2/2010	4:55:39 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:55:39 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	4:55:39 PM	Tube furnace set to 0
9/2/2010	4:55:39 PM	Run finished at 4:55 PM
9/2/2010	4:55:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/2/2010	4:56:33 PM	Recipe started at 4:56 PM
9/2/2010	4:56:33 PM	Helium valve closed
9/2/2010	4:56:33 PM	BCl3 valve closed
9/2/2010	4:56:33 PM	PH3 valve closed
9/2/2010	4:56:33 PM	SiCl4 pre valve closed
9/2/2010	4:56:33 PM	SiCl4 post valve closed
9/2/2010	4:56:33 PM	Main Vac valve closed
9/2/2010	4:56:33 PM	Bypass valve closed
9/2/2010	4:56:33 PM	Bubbler valve closed
9/2/2010	4:56:33 PM	H2 valve opened
9/2/2010	4:56:33 PM	Helium MFC set to  0.000000
9/2/2010	4:56:33 PM	H2 MFC set to  500.000000
9/2/2010	4:56:33 PM	BCl3 MFC set to  0.000000
9/2/2010	4:56:33 PM	PHl3 MFC set to  0.000000
9/2/2010	4:56:33 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:56:33 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	4:56:33 PM	Tube furnace set to 0
9/2/2010	4:57:52 PM	Helium valve closed
9/2/2010	4:57:52 PM	BCl3 valve closed
9/2/2010	4:57:52 PM	PH3 valve closed
9/2/2010	4:57:52 PM	SiCl4 pre valve closed
9/2/2010	4:57:52 PM	SiCl4 post valve closed
9/2/2010	4:57:52 PM	Main Vac valve closed
9/2/2010	4:57:52 PM	Bypass valve closed
9/2/2010	4:57:52 PM	H2 valve opened
9/2/2010	4:57:52 PM	Bubbler valve opened
9/2/2010	4:57:52 PM	Helium MFC set to  0.000000
9/2/2010	4:57:52 PM	H2 MFC set to  500.000000
9/2/2010	4:57:52 PM	BCl3 MFC set to  0.000000
9/2/2010	4:57:52 PM	PHl3 MFC set to  0.000000
9/2/2010	4:57:52 PM	SiCl4 MFC set to  0.000000
9/2/2010	4:57:52 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	4:57:53 PM	Tube furnace set to 1000
9/2/2010	5:17:52 PM	Helium valve closed
9/2/2010	5:17:52 PM	PH3 valve closed
9/2/2010	5:17:52 PM	Main Vac valve closed
9/2/2010	5:17:52 PM	Bypass valve closed
9/2/2010	5:17:52 PM	H2 valve opened
9/2/2010	5:17:52 PM	BCl3 valve opened
9/2/2010	5:17:52 PM	SiCl4 pre valve opened
9/2/2010	5:17:52 PM	SiCl4 post valve opened
9/2/2010	5:17:52 PM	Bubbler valve opened
9/2/2010	5:17:52 PM	Helium MFC set to  0.000000
9/2/2010	5:17:52 PM	H2 MFC set to  500.000000
9/2/2010	5:17:52 PM	BCl3 MFC set to  6.000000
9/2/2010	5:17:52 PM	PHl3 MFC set to  0.000000
9/2/2010	5:17:52 PM	SiCl4 MFC set to  50.000000
9/2/2010	5:17:52 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	5:17:53 PM	Tube furnace set to 1000
9/2/2010	5:31:13 PM	H2 valve closed
9/2/2010	5:31:13 PM	BCl3 valve closed
9/2/2010	5:31:13 PM	PH3 valve closed
9/2/2010	5:31:13 PM	SiCl4 pre valve closed
9/2/2010	5:31:13 PM	SiCl4 post valve closed
9/2/2010	5:31:13 PM	Main Vac valve closed
9/2/2010	5:31:13 PM	Bypass valve closed
9/2/2010	5:31:13 PM	Helium valve opened
9/2/2010	5:31:13 PM	Bubbler valve opened
9/2/2010	5:31:13 PM	Helium MFC set to  500.000000
9/2/2010	5:31:13 PM	H2 MFC set to  0.000000
9/2/2010	5:31:13 PM	BCl3 MFC set to  0.000000
9/2/2010	5:31:13 PM	PHl3 MFC set to  0.000000
9/2/2010	5:31:13 PM	SiCl4 MFC set to  0.000000
9/2/2010	5:31:13 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	5:31:13 PM	Tube furnace set to 0
9/2/2010	5:51:13 PM	Helium valve closed
9/2/2010	5:51:13 PM	H2 valve closed
9/2/2010	5:51:13 PM	BCl3 valve closed
9/2/2010	5:51:13 PM	PH3 valve closed
9/2/2010	5:51:13 PM	SiCl4 pre valve closed
9/2/2010	5:51:13 PM	SiCl4 post valve closed
9/2/2010	5:51:13 PM	Main Vac valve closed
9/2/2010	5:51:13 PM	Bypass valve closed
9/2/2010	5:51:13 PM	Bubbler valve closed
9/2/2010	5:51:13 PM	Helium MFC set to  0.000000
9/2/2010	5:51:13 PM	H2 MFC set to  0.000000
9/2/2010	5:51:13 PM	BCl3 MFC set to  0.000000
9/2/2010	5:51:13 PM	PHl3 MFC set to  0.000000
9/2/2010	5:51:13 PM	SiCl4 MFC set to  0.000000
9/2/2010	5:51:13 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	5:51:13 PM	Tube furnace set to 0
9/2/2010	5:51:13 PM	Run finished at 5:51 PM
9/2/2010	6:06:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/2/2010	6:06:21 PM	Recipe started at 6:06 PM
9/2/2010	6:06:21 PM	Helium valve closed
9/2/2010	6:06:21 PM	H2 valve closed
9/2/2010	6:06:21 PM	BCl3 valve closed
9/2/2010	6:06:21 PM	PH3 valve closed
9/2/2010	6:06:21 PM	SiCl4 pre valve closed
9/2/2010	6:06:21 PM	SiCl4 post valve closed
9/2/2010	6:06:21 PM	Main Vac valve closed
9/2/2010	6:06:21 PM	Bubbler valve closed
9/2/2010	6:06:21 PM	Bypass valve opened
9/2/2010	6:06:21 PM	Helium MFC set to  0.000000
9/2/2010	6:06:21 PM	H2 MFC set to  0.000000
9/2/2010	6:06:21 PM	BCl3 MFC set to  0.000000
9/2/2010	6:06:21 PM	PHl3 MFC set to  0.000000
9/2/2010	6:06:21 PM	SiCl4 MFC set to  0.000000
9/2/2010	6:06:21 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	6:06:21 PM	Tube furnace set to 0
9/2/2010	6:06:59 PM	Helium valve closed
9/2/2010	6:06:59 PM	H2 valve closed
9/2/2010	6:06:59 PM	BCl3 valve closed
9/2/2010	6:06:59 PM	PH3 valve closed
9/2/2010	6:06:59 PM	SiCl4 pre valve closed
9/2/2010	6:06:59 PM	SiCl4 post valve closed
9/2/2010	6:06:59 PM	Bubbler valve closed
9/2/2010	6:06:59 PM	Main Vac valve opened
9/2/2010	6:06:59 PM	Bypass valve opened
9/2/2010	6:06:59 PM	Helium MFC set to  0.000000
9/2/2010	6:06:59 PM	H2 MFC set to  0.000000
9/2/2010	6:06:59 PM	BCl3 MFC set to  0.000000
9/2/2010	6:06:59 PM	PHl3 MFC set to  0.000000
9/2/2010	6:06:59 PM	SiCl4 MFC set to  0.000000
9/2/2010	6:06:59 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	6:06:59 PM	Tube furnace set to 0
9/2/2010	6:07:00 PM	Run finished at 6:07 PM
9/2/2010	6:07:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/2/2010	6:20:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	6:20:28 PM	Recipe started at 6:20 PM
9/2/2010	6:20:28 PM	Helium valve closed
9/2/2010	6:20:28 PM	H2 valve closed
9/2/2010	6:20:28 PM	BCl3 valve closed
9/2/2010	6:20:28 PM	PH3 valve closed
9/2/2010	6:20:28 PM	SiCl4 pre valve closed
9/2/2010	6:20:28 PM	SiCl4 post valve closed
9/2/2010	6:20:28 PM	Main Vac valve closed
9/2/2010	6:20:28 PM	Bubbler valve closed
9/2/2010	6:20:28 PM	Bypass valve opened
9/2/2010	6:20:28 PM	Helium MFC set to  0.000000
9/2/2010	6:20:29 PM	H2 MFC set to  0.000000
9/2/2010	6:20:29 PM	BCl3 MFC set to  0.000000
9/2/2010	6:20:29 PM	PHl3 MFC set to  0.000000
9/2/2010	6:20:29 PM	SiCl4 MFC set to  0.000000
9/2/2010	6:20:29 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	6:20:29 PM	Tube furnace set to 0
9/2/2010	6:20:29 PM	Helium valve closed
9/2/2010	6:20:29 PM	H2 valve closed
9/2/2010	6:20:29 PM	BCl3 valve closed
9/2/2010	6:20:29 PM	PH3 valve closed
9/2/2010	6:20:29 PM	SiCl4 pre valve closed
9/2/2010	6:20:29 PM	SiCl4 post valve closed
9/2/2010	6:20:29 PM	Bubbler valve closed
9/2/2010	6:20:29 PM	Main Vac valve opened
9/2/2010	6:20:29 PM	Bypass valve opened
9/2/2010	6:20:29 PM	Helium MFC set to  0.000000
9/2/2010	6:20:29 PM	H2 MFC set to  0.000000
9/2/2010	6:20:29 PM	BCl3 MFC set to  0.000000
9/2/2010	6:20:29 PM	PHl3 MFC set to  0.000000
9/2/2010	6:20:29 PM	SiCl4 MFC set to  0.000000
9/2/2010	6:20:29 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	6:20:29 PM	Tube furnace set to 0
9/2/2010	6:21:29 PM	H2 valve closed
9/2/2010	6:21:29 PM	BCl3 valve closed
9/2/2010	6:21:29 PM	PH3 valve closed
9/2/2010	6:21:29 PM	SiCl4 pre valve closed
9/2/2010	6:21:29 PM	SiCl4 post valve closed
9/2/2010	6:21:29 PM	Bubbler valve closed
9/2/2010	6:21:29 PM	Helium valve opened
9/2/2010	6:21:29 PM	Main Vac valve opened
9/2/2010	6:21:29 PM	Bypass valve opened
9/2/2010	6:21:29 PM	Helium MFC set to  100.000000
9/2/2010	6:21:29 PM	H2 MFC set to  0.000000
9/2/2010	6:21:29 PM	BCl3 MFC set to  0.000000
9/2/2010	6:21:29 PM	PHl3 MFC set to  0.000000
9/2/2010	6:21:29 PM	SiCl4 MFC set to  0.000000
9/2/2010	6:21:29 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	6:21:29 PM	Tube furnace set to 0
9/2/2010	6:30:29 PM	Helium valve closed
9/2/2010	6:30:29 PM	H2 valve closed
9/2/2010	6:30:29 PM	BCl3 valve closed
9/2/2010	6:30:29 PM	PH3 valve closed
9/2/2010	6:30:29 PM	SiCl4 pre valve closed
9/2/2010	6:30:29 PM	SiCl4 post valve closed
9/2/2010	6:30:29 PM	Bubbler valve closed
9/2/2010	6:30:29 PM	Main Vac valve opened
9/2/2010	6:30:29 PM	Bypass valve opened
9/2/2010	6:30:29 PM	Helium MFC set to  0.000000
9/2/2010	6:30:29 PM	H2 MFC set to  0.000000
9/2/2010	6:30:30 PM	BCl3 MFC set to  0.000000
9/2/2010	6:30:30 PM	PHl3 MFC set to  0.000000
9/2/2010	6:30:30 PM	SiCl4 MFC set to  0.000000
9/2/2010	6:30:30 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	6:30:30 PM	Tube furnace set to 0
9/2/2010	6:31:30 PM	H2 valve closed
9/2/2010	6:31:30 PM	BCl3 valve closed
9/2/2010	6:31:30 PM	PH3 valve closed
9/2/2010	6:31:30 PM	SiCl4 pre valve closed
9/2/2010	6:31:30 PM	SiCl4 post valve closed
9/2/2010	6:31:30 PM	Bubbler valve closed
9/2/2010	6:31:30 PM	Helium valve opened
9/2/2010	6:31:30 PM	Main Vac valve opened
9/2/2010	6:31:30 PM	Bypass valve opened
9/2/2010	6:31:30 PM	Helium MFC set to  100.000000
9/2/2010	6:31:30 PM	H2 MFC set to  0.000000
9/2/2010	6:31:30 PM	BCl3 MFC set to  0.000000
9/2/2010	6:31:30 PM	PHl3 MFC set to  0.000000
9/2/2010	6:31:30 PM	SiCl4 MFC set to  0.000000
9/2/2010	6:31:30 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	6:31:30 PM	Tube furnace set to 0
9/2/2010	6:40:30 PM	Helium valve closed
9/2/2010	6:40:30 PM	H2 valve closed
9/2/2010	6:40:30 PM	BCl3 valve closed
9/2/2010	6:40:30 PM	PH3 valve closed
9/2/2010	6:40:30 PM	SiCl4 pre valve closed
9/2/2010	6:40:30 PM	SiCl4 post valve closed
9/2/2010	6:40:30 PM	Bubbler valve closed
9/2/2010	6:40:30 PM	Main Vac valve opened
9/2/2010	6:40:30 PM	Bypass valve opened
9/2/2010	6:40:30 PM	Helium MFC set to  0.000000
9/2/2010	6:40:30 PM	H2 MFC set to  0.000000
9/2/2010	6:40:30 PM	BCl3 MFC set to  0.000000
9/2/2010	6:40:30 PM	PHl3 MFC set to  0.000000
9/2/2010	6:40:30 PM	SiCl4 MFC set to  0.000000
9/2/2010	6:40:30 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	6:40:30 PM	Tube furnace set to 0
9/2/2010	6:41:30 PM	H2 valve closed
9/2/2010	6:41:30 PM	BCl3 valve closed
9/2/2010	6:41:30 PM	PH3 valve closed
9/2/2010	6:41:30 PM	SiCl4 pre valve closed
9/2/2010	6:41:30 PM	SiCl4 post valve closed
9/2/2010	6:41:30 PM	Bubbler valve closed
9/2/2010	6:41:30 PM	Helium valve opened
9/2/2010	6:41:30 PM	Main Vac valve opened
9/2/2010	6:41:30 PM	Bypass valve opened
9/2/2010	6:41:30 PM	Helium MFC set to  100.000000
9/2/2010	6:41:30 PM	H2 MFC set to  0.000000
9/2/2010	6:41:30 PM	BCl3 MFC set to  0.000000
9/2/2010	6:41:30 PM	PHl3 MFC set to  0.000000
9/2/2010	6:41:30 PM	SiCl4 MFC set to  0.000000
9/2/2010	6:41:30 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	6:41:30 PM	Tube furnace set to 0
9/2/2010	6:50:30 PM	Helium valve closed
9/2/2010	6:50:30 PM	H2 valve closed
9/2/2010	6:50:30 PM	BCl3 valve closed
9/2/2010	6:50:30 PM	PH3 valve closed
9/2/2010	6:50:30 PM	SiCl4 pre valve closed
9/2/2010	6:50:30 PM	SiCl4 post valve closed
9/2/2010	6:50:30 PM	Bubbler valve closed
9/2/2010	6:50:30 PM	Main Vac valve opened
9/2/2010	6:50:30 PM	Bypass valve opened
9/2/2010	6:50:30 PM	Helium MFC set to  0.000000
9/2/2010	6:50:30 PM	H2 MFC set to  0.000000
9/2/2010	6:50:30 PM	BCl3 MFC set to  0.000000
9/2/2010	6:50:30 PM	PHl3 MFC set to  0.000000
9/2/2010	6:50:30 PM	SiCl4 MFC set to  0.000000
9/2/2010	6:50:30 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	6:50:30 PM	Tube furnace set to 0
9/2/2010	6:50:31 PM	Run finished at 6:50 PM
9/2/2010	6:50:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	6:58:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	6:58:49 PM	Recipe started at 6:58 PM
9/2/2010	6:58:49 PM	Helium valve closed
9/2/2010	6:58:49 PM	H2 valve closed
9/2/2010	6:58:49 PM	BCl3 valve closed
9/2/2010	6:58:49 PM	PH3 valve closed
9/2/2010	6:58:49 PM	SiCl4 pre valve closed
9/2/2010	6:58:49 PM	SiCl4 post valve closed
9/2/2010	6:58:49 PM	Main Vac valve closed
9/2/2010	6:58:49 PM	Bubbler valve closed
9/2/2010	6:58:49 PM	Bypass valve opened
9/2/2010	6:58:49 PM	Helium MFC set to  0.000000
9/2/2010	6:58:49 PM	H2 MFC set to  0.000000
9/2/2010	6:58:49 PM	BCl3 MFC set to  0.000000
9/2/2010	6:58:49 PM	PHl3 MFC set to  0.000000
9/2/2010	6:58:49 PM	SiCl4 MFC set to  0.000000
9/2/2010	6:58:49 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	6:58:49 PM	Tube furnace set to 0
9/2/2010	6:58:49 PM	Helium valve closed
9/2/2010	6:58:49 PM	H2 valve closed
9/2/2010	6:58:49 PM	BCl3 valve closed
9/2/2010	6:58:49 PM	PH3 valve closed
9/2/2010	6:58:49 PM	SiCl4 pre valve closed
9/2/2010	6:58:49 PM	SiCl4 post valve closed
9/2/2010	6:58:49 PM	Bubbler valve closed
9/2/2010	6:58:49 PM	Main Vac valve opened
9/2/2010	6:58:49 PM	Bypass valve opened
9/2/2010	6:58:49 PM	Helium MFC set to  0.000000
9/2/2010	6:58:49 PM	H2 MFC set to  0.000000
9/2/2010	6:58:49 PM	BCl3 MFC set to  0.000000
9/2/2010	6:58:49 PM	PHl3 MFC set to  0.000000
9/2/2010	6:58:49 PM	SiCl4 MFC set to  0.000000
9/2/2010	6:58:49 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	6:58:50 PM	Tube furnace set to 0
9/2/2010	6:59:50 PM	H2 valve closed
9/2/2010	6:59:50 PM	BCl3 valve closed
9/2/2010	6:59:50 PM	PH3 valve closed
9/2/2010	6:59:50 PM	SiCl4 pre valve closed
9/2/2010	6:59:50 PM	SiCl4 post valve closed
9/2/2010	6:59:50 PM	Bubbler valve closed
9/2/2010	6:59:50 PM	Helium valve opened
9/2/2010	6:59:50 PM	Main Vac valve opened
9/2/2010	6:59:50 PM	Bypass valve opened
9/2/2010	6:59:50 PM	Helium MFC set to  100.000000
9/2/2010	6:59:50 PM	H2 MFC set to  0.000000
9/2/2010	6:59:50 PM	BCl3 MFC set to  0.000000
9/2/2010	6:59:50 PM	PHl3 MFC set to  0.000000
9/2/2010	6:59:50 PM	SiCl4 MFC set to  0.000000
9/2/2010	6:59:50 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	6:59:50 PM	Tube furnace set to 0
9/2/2010	7:02:51 PM	Helium valve closed
9/2/2010	7:02:51 PM	H2 valve closed
9/2/2010	7:02:51 PM	BCl3 valve closed
9/2/2010	7:02:51 PM	PH3 valve closed
9/2/2010	7:02:51 PM	SiCl4 pre valve closed
9/2/2010	7:02:51 PM	SiCl4 post valve closed
9/2/2010	7:02:51 PM	Bubbler valve closed
9/2/2010	7:02:51 PM	Main Vac valve opened
9/2/2010	7:02:51 PM	Bypass valve opened
9/2/2010	7:02:51 PM	Helium MFC set to  0.000000
9/2/2010	7:02:51 PM	H2 MFC set to  0.000000
9/2/2010	7:02:51 PM	BCl3 MFC set to  0.000000
9/2/2010	7:02:51 PM	PHl3 MFC set to  0.000000
9/2/2010	7:02:51 PM	SiCl4 MFC set to  0.000000
9/2/2010	7:02:51 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	7:02:51 PM	Tube furnace set to 0
9/2/2010	7:02:52 PM	H2 valve closed
9/2/2010	7:02:52 PM	BCl3 valve closed
9/2/2010	7:02:52 PM	PH3 valve closed
9/2/2010	7:02:52 PM	SiCl4 pre valve closed
9/2/2010	7:02:52 PM	SiCl4 post valve closed
9/2/2010	7:02:52 PM	Bubbler valve closed
9/2/2010	7:02:52 PM	Helium valve opened
9/2/2010	7:02:52 PM	Main Vac valve opened
9/2/2010	7:02:52 PM	Bypass valve opened
9/2/2010	7:02:52 PM	Helium MFC set to  100.000000
9/2/2010	7:02:52 PM	H2 MFC set to  0.000000
9/2/2010	7:02:52 PM	BCl3 MFC set to  0.000000
9/2/2010	7:02:52 PM	PHl3 MFC set to  0.000000
9/2/2010	7:02:52 PM	SiCl4 MFC set to  0.000000
9/2/2010	7:02:52 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	7:02:52 PM	Tube furnace set to 0
9/2/2010	7:02:53 PM	Helium valve closed
9/2/2010	7:02:53 PM	H2 valve closed
9/2/2010	7:02:53 PM	BCl3 valve closed
9/2/2010	7:02:53 PM	PH3 valve closed
9/2/2010	7:02:53 PM	SiCl4 pre valve closed
9/2/2010	7:02:53 PM	SiCl4 post valve closed
9/2/2010	7:02:53 PM	Bubbler valve closed
9/2/2010	7:02:53 PM	Main Vac valve opened
9/2/2010	7:02:53 PM	Bypass valve opened
9/2/2010	7:02:53 PM	Helium MFC set to  0.000000
9/2/2010	7:02:53 PM	H2 MFC set to  0.000000
9/2/2010	7:02:53 PM	BCl3 MFC set to  0.000000
9/2/2010	7:02:53 PM	PHl3 MFC set to  0.000000
9/2/2010	7:02:53 PM	SiCl4 MFC set to  0.000000
9/2/2010	7:02:53 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	7:02:53 PM	Tube furnace set to 0
9/2/2010	7:02:53 PM	H2 valve closed
9/2/2010	7:02:53 PM	BCl3 valve closed
9/2/2010	7:02:53 PM	PH3 valve closed
9/2/2010	7:02:53 PM	SiCl4 pre valve closed
9/2/2010	7:02:53 PM	SiCl4 post valve closed
9/2/2010	7:02:53 PM	Bubbler valve closed
9/2/2010	7:02:53 PM	Helium valve opened
9/2/2010	7:02:53 PM	Main Vac valve opened
9/2/2010	7:02:53 PM	Bypass valve opened
9/2/2010	7:02:53 PM	Helium MFC set to  100.000000
9/2/2010	7:02:53 PM	H2 MFC set to  0.000000
9/2/2010	7:02:53 PM	BCl3 MFC set to  0.000000
9/2/2010	7:02:53 PM	PHl3 MFC set to  0.000000
9/2/2010	7:02:53 PM	SiCl4 MFC set to  0.000000
9/2/2010	7:02:53 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	7:02:54 PM	Tube furnace set to 0
9/2/2010	7:02:54 PM	Helium valve closed
9/2/2010	7:02:54 PM	H2 valve closed
9/2/2010	7:02:54 PM	BCl3 valve closed
9/2/2010	7:02:54 PM	PH3 valve closed
9/2/2010	7:02:54 PM	SiCl4 pre valve closed
9/2/2010	7:02:54 PM	SiCl4 post valve closed
9/2/2010	7:02:54 PM	Bubbler valve closed
9/2/2010	7:02:54 PM	Main Vac valve opened
9/2/2010	7:02:54 PM	Bypass valve opened
9/2/2010	7:02:54 PM	Helium MFC set to  0.000000
9/2/2010	7:02:54 PM	H2 MFC set to  0.000000
9/2/2010	7:02:54 PM	BCl3 MFC set to  0.000000
9/2/2010	7:02:54 PM	PHl3 MFC set to  0.000000
9/2/2010	7:02:54 PM	SiCl4 MFC set to  0.000000
9/2/2010	7:02:54 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	7:02:54 PM	Tube furnace set to 0
9/2/2010	7:02:55 PM	Run finished at 7:02 PM
9/2/2010	7:02:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/2/2010	7:04:58 PM	Recipe started at 7:04 PM
9/2/2010	7:04:58 PM	Helium valve closed
9/2/2010	7:04:58 PM	BCl3 valve closed
9/2/2010	7:04:58 PM	PH3 valve closed
9/2/2010	7:04:58 PM	SiCl4 pre valve closed
9/2/2010	7:04:58 PM	SiCl4 post valve closed
9/2/2010	7:04:58 PM	Main Vac valve closed
9/2/2010	7:04:58 PM	Bypass valve closed
9/2/2010	7:04:58 PM	Bubbler valve closed
9/2/2010	7:04:58 PM	H2 valve opened
9/2/2010	7:04:58 PM	Helium MFC set to  0.000000
9/2/2010	7:04:58 PM	H2 MFC set to  500.000000
9/2/2010	7:04:58 PM	BCl3 MFC set to  0.000000
9/2/2010	7:04:58 PM	PHl3 MFC set to  0.000000
9/2/2010	7:04:59 PM	SiCl4 MFC set to  0.000000
9/2/2010	7:04:59 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	7:04:59 PM	Tube furnace set to 0
9/2/2010	7:04:59 PM	Helium valve closed
9/2/2010	7:04:59 PM	BCl3 valve closed
9/2/2010	7:04:59 PM	PH3 valve closed
9/2/2010	7:04:59 PM	SiCl4 pre valve closed
9/2/2010	7:04:59 PM	SiCl4 post valve closed
9/2/2010	7:04:59 PM	Main Vac valve closed
9/2/2010	7:04:59 PM	Bypass valve closed
9/2/2010	7:04:59 PM	Bubbler valve closed
9/2/2010	7:04:59 PM	H2 valve opened
9/2/2010	7:04:59 PM	Helium MFC set to  0.000000
9/2/2010	7:04:59 PM	H2 MFC set to  500.000000
9/2/2010	7:04:59 PM	BCl3 MFC set to  0.000000
9/2/2010	7:04:59 PM	PHl3 MFC set to  0.000000
9/2/2010	7:04:59 PM	SiCl4 MFC set to  0.000000
9/2/2010	7:04:59 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	7:04:59 PM	Tube furnace set to 1000
9/2/2010	7:04:59 PM	Helium valve closed
9/2/2010	7:04:59 PM	H2 valve closed
9/2/2010	7:04:59 PM	BCl3 valve closed
9/2/2010	7:04:59 PM	PH3 valve closed
9/2/2010	7:04:59 PM	SiCl4 pre valve closed
9/2/2010	7:04:59 PM	SiCl4 post valve closed
9/2/2010	7:04:59 PM	Main Vac valve closed
9/2/2010	7:04:59 PM	Bubbler valve closed
9/2/2010	7:04:59 PM	Bypass valve closed
9/2/2010	7:04:59 PM	Helium MFC set to  0.000000
9/2/2010	7:04:59 PM	H2 MFC set to  0.000000
9/2/2010	7:04:59 PM	BCl3 MFC set to  0.000000
9/2/2010	7:04:59 PM	PHl3 MFC set to  0.000000
9/2/2010	7:04:59 PM	SiCl4 MFC set to  0.000000
9/2/2010	7:04:59 PM	Bypass solenoid MFC set to  760.000000
9/2/2010	7:04:59 PM	Tube furnace set to 0
9/2/2010	7:04:59 PM	Baratron reads 5.301319 Torr and NaOH valve is open.  Emergency exit.
9/2/2010	7:05:01 PM	Run aborted at 7:05 PM
9/2/2010	7:05:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/2/2010	7:05:04 PM	Recipe started at 7:05 PM
9/2/2010	7:05:04 PM	Helium valve closed
9/2/2010	7:05:04 PM	H2 valve closed
9/2/2010	7:05:04 PM	BCl3 valve closed
9/2/2010	7:05:04 PM	PH3 valve closed
9/2/2010	7:05:04 PM	SiCl4 pre valve closed
9/2/2010	7:05:04 PM	SiCl4 post valve closed
9/2/2010	7:05:04 PM	Main Vac valve closed
9/2/2010	7:05:04 PM	Bubbler valve closed
9/2/2010	7:05:04 PM	Bypass valve opened
9/2/2010	7:05:04 PM	Helium MFC set to  0.000000
9/2/2010	7:05:04 PM	H2 MFC set to  0.000000
9/2/2010	7:05:04 PM	BCl3 MFC set to  0.000000
9/2/2010	7:05:04 PM	PHl3 MFC set to  0.000000
9/2/2010	7:05:04 PM	SiCl4 MFC set to  0.000000
9/2/2010	7:05:04 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	7:05:04 PM	Tube furnace set to 0
9/2/2010	7:05:04 PM	Helium valve closed
9/2/2010	7:05:04 PM	H2 valve closed
9/2/2010	7:05:04 PM	BCl3 valve closed
9/2/2010	7:05:04 PM	PH3 valve closed
9/2/2010	7:05:04 PM	SiCl4 pre valve closed
9/2/2010	7:05:04 PM	SiCl4 post valve closed
9/2/2010	7:05:04 PM	Bubbler valve closed
9/2/2010	7:05:04 PM	Main Vac valve opened
9/2/2010	7:05:04 PM	Bypass valve opened
9/2/2010	7:05:04 PM	Helium MFC set to  0.000000
9/2/2010	7:05:04 PM	H2 MFC set to  0.000000
9/2/2010	7:05:04 PM	BCl3 MFC set to  0.000000
9/2/2010	7:05:04 PM	PHl3 MFC set to  0.000000
9/2/2010	7:05:04 PM	SiCl4 MFC set to  0.000000
9/2/2010	7:05:04 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	7:05:05 PM	Tube furnace set to 0
9/2/2010	7:05:05 PM	Run finished at 7:05 PM
9/2/2010	7:05:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/2/2010	7:05:52 PM	Recipe started at 7:05 PM
9/2/2010	7:05:52 PM	Helium valve closed
9/2/2010	7:05:52 PM	BCl3 valve closed
9/2/2010	7:05:52 PM	PH3 valve closed
9/2/2010	7:05:52 PM	SiCl4 pre valve closed
9/2/2010	7:05:52 PM	SiCl4 post valve closed
9/2/2010	7:05:52 PM	Main Vac valve closed
9/2/2010	7:05:52 PM	Bypass valve closed
9/2/2010	7:05:52 PM	Bubbler valve closed
9/2/2010	7:05:52 PM	H2 valve opened
9/2/2010	7:05:52 PM	Helium MFC set to  0.000000
9/2/2010	7:05:52 PM	H2 MFC set to  500.000000
9/2/2010	7:05:52 PM	BCl3 MFC set to  0.000000
9/2/2010	7:05:52 PM	PHl3 MFC set to  0.000000
9/2/2010	7:05:52 PM	SiCl4 MFC set to  0.000000
9/2/2010	7:05:52 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	7:05:52 PM	Tube furnace set to 0
9/2/2010	7:07:10 PM	Helium valve closed
9/2/2010	7:07:10 PM	BCl3 valve closed
9/2/2010	7:07:10 PM	PH3 valve closed
9/2/2010	7:07:10 PM	SiCl4 pre valve closed
9/2/2010	7:07:10 PM	SiCl4 post valve closed
9/2/2010	7:07:10 PM	Main Vac valve closed
9/2/2010	7:07:10 PM	Bypass valve closed
9/2/2010	7:07:10 PM	H2 valve opened
9/2/2010	7:07:10 PM	Bubbler valve opened
9/2/2010	7:07:10 PM	Helium MFC set to  0.000000
9/2/2010	7:07:10 PM	H2 MFC set to  500.000000
9/2/2010	7:07:10 PM	BCl3 MFC set to  0.000000
9/2/2010	7:07:10 PM	PHl3 MFC set to  0.000000
9/2/2010	7:07:10 PM	SiCl4 MFC set to  0.000000
9/2/2010	7:07:10 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	7:07:10 PM	Tube furnace set to 1000
9/2/2010	7:27:10 PM	Helium valve closed
9/2/2010	7:27:10 PM	PH3 valve closed
9/2/2010	7:27:10 PM	Main Vac valve closed
9/2/2010	7:27:10 PM	Bypass valve closed
9/2/2010	7:27:10 PM	H2 valve opened
9/2/2010	7:27:10 PM	BCl3 valve opened
9/2/2010	7:27:10 PM	SiCl4 pre valve opened
9/2/2010	7:27:10 PM	SiCl4 post valve opened
9/2/2010	7:27:10 PM	Bubbler valve opened
9/2/2010	7:27:10 PM	Helium MFC set to  0.000000
9/2/2010	7:27:10 PM	H2 MFC set to  500.000000
9/2/2010	7:27:10 PM	BCl3 MFC set to  6.000000
9/2/2010	7:27:10 PM	PHl3 MFC set to  0.000000
9/2/2010	7:27:10 PM	SiCl4 MFC set to  50.000000
9/2/2010	7:27:10 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	7:27:10 PM	Tube furnace set to 1000
9/2/2010	7:42:10 PM	H2 valve closed
9/2/2010	7:42:10 PM	BCl3 valve closed
9/2/2010	7:42:10 PM	PH3 valve closed
9/2/2010	7:42:10 PM	SiCl4 pre valve closed
9/2/2010	7:42:10 PM	SiCl4 post valve closed
9/2/2010	7:42:10 PM	Main Vac valve closed
9/2/2010	7:42:10 PM	Bypass valve closed
9/2/2010	7:42:10 PM	Helium valve opened
9/2/2010	7:42:10 PM	Bubbler valve opened
9/2/2010	7:42:10 PM	Helium MFC set to  500.000000
9/2/2010	7:42:10 PM	H2 MFC set to  0.000000
9/2/2010	7:42:10 PM	BCl3 MFC set to  0.000000
9/2/2010	7:42:10 PM	PHl3 MFC set to  0.000000
9/2/2010	7:42:10 PM	SiCl4 MFC set to  0.000000
9/2/2010	7:42:10 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	7:42:10 PM	Tube furnace set to 0
9/2/2010	8:02:10 PM	Helium valve closed
9/2/2010	8:02:10 PM	H2 valve closed
9/2/2010	8:02:10 PM	BCl3 valve closed
9/2/2010	8:02:10 PM	PH3 valve closed
9/2/2010	8:02:10 PM	SiCl4 pre valve closed
9/2/2010	8:02:10 PM	SiCl4 post valve closed
9/2/2010	8:02:10 PM	Main Vac valve closed
9/2/2010	8:02:10 PM	Bypass valve closed
9/2/2010	8:02:10 PM	Bubbler valve closed
9/2/2010	8:02:10 PM	Helium MFC set to  0.000000
9/2/2010	8:02:10 PM	H2 MFC set to  0.000000
9/2/2010	8:02:10 PM	BCl3 MFC set to  0.000000
9/2/2010	8:02:10 PM	PHl3 MFC set to  0.000000
9/2/2010	8:02:10 PM	SiCl4 MFC set to  0.000000
9/2/2010	8:02:10 PM	Bypass solenoid MFC set to  0.000000
9/2/2010	8:02:10 PM	Tube furnace set to 0
9/2/2010	8:02:10 PM	Run finished at 8:02 PM
